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出 处:《传感器技术与应用》2023年第1期42-50,共9页Journal of Sensor Technology and Application
摘 要:基于表面等离子体共振(SPR)理论,研究了一种双芯光纤侧面抛磨结构的纳米位移传感器;这种微型传感器在双芯光纤侧面抛磨区采用Otto模型,使用45 nm厚的银膜来激发双芯光纤抛磨表面的等离子体共振效应,抛磨面与银膜之间的间隙距离即为所要测量的纳米位移。基于有限元分析方法对传感模型以及双芯光纤中的传输光路进行仿真,然后通过多层膜传输理论计算,来进一步验证和优化传感器的性能,从而获得不同纳米位移时共振曲线的分布。间隙层纳米位移的变化与共振波长的偏移具有良好的线性关系,位移测量范围为50 nm至150 nm,灵敏度为0.12594 nm/nm。Based on the theory of surface plasmon resonance (SPR), a novel nano-displacement sensor with a twin-core fiber side polished structure was studied. This micro sensor adopts Otto model in the side polishing area of the twin-core fiber, and a 45 nm silver film is used to excite the plasma resonance effect on the polishing surface of the twin-core fiber. The gap distance between the polishing surface and the silver film is the nano-displacement to be measured. The sensor model and the transmis-sion optical path in the twin-core fiber are simulated based on the finite element analysis method. Then the performance of the sensor is further verified and optimized through the theoretical calcu-lation of multi-layer film transmission, so that the distribution of the resonance curve with different displacements can be obtained. The change of the nano-displacement of the gap layer has a good linear relationship with the shift of the resonance wavelength. The displacement measurement range is 50 nm to 150 nm, and the sensitivity is 0.12594 nm/nm.
关 键 词:表面等离子体共振 光纤传感器 纳米位移 Otto模型 双芯光纤
分 类 号:TP212[自动化与计算机技术—检测技术与自动化装置]
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