不同形貌MoO₃气体传感器的制备及对丙酮的气敏性能研究  

Preparation of MoO3 Gas Sensors with Different Morphologies and Study on Gas Sensitivity to Acetone

作　　者：曹欢欢 

机构地区：[1]天津工业大学物理科学与技术学院,天津

出　　处：《传感器技术与应用》2024年第3期495-503,共9页Journal of Sensor Technology and Application

摘　　要：本研究采用水热法,以钼酸钠和钼酸铵为钼源,双氧水、盐酸两种不同介质分别制备了纳米带状和纳米片状MoO3。通过XRD,SEM表征和两种不同形貌MoO3对100 ppm丙酮的气敏性能测试显示两种形状的MoO3气体传感器的结晶度和纯度都比较高。纳米带状MoO3长约数10微米,宽约165 nm。对丙酮的响应是2.84,最佳工作温度是320℃,响应–恢复时间为9 s/46 s。纳米片状MoO3长约1.471 μm,宽约为2.266 μm,厚度约为300 nm。对丙酮的响应是2.97,最佳工作温度是360℃,响应–恢复时间为13 s/98 s。综合比较纳米带形状的MoO3对丙酮有更好的性能,更适合制作丙酮传感器。In this study, nano-strips and nano-flakes MoO3 were prepared by hydrothermal method using sodium molybdate and ammonium molybdate as molybdenum sources, hydrogen peroxide and hydrochloric acid as different media. Through XRD, SEM characterization and gas sensitive performance test of two different morphologies of MoO3 on 100 ppm acetone, the crystallinity and purity of the three shapes of MoO3 gas sensors are relatively high. The nano-strip MoO3 is about tens of microns long and 165 nm wide. The response to acetone is 2.84, the optimal operating temperature is 320˚C, and the response-recovery time is 9 s/46 s. The nano-flake MoO3 is about 1.471 μm long, 2.266 μm wide and 300 nm thick. The response to acetone is 2.97, the optimal operating temperature is 360˚C, and the response-recovery time is 13 s/98 s. MoO3 with the shape of nano-strips has better performance against acetone and is more suitable for making acetone sensor.

关 键 词：金属半导体氧化物 水热法 丙酮 MoO₃ 气体传感器 

分 类 号：TB3[一般工业技术—材料科学与工程]