基于游标效应的飞秒激光直写波导温度传感器  

Femtosecond Laser Direct Writing Waveguide Temperature Sensor Based on Vernier Effect

作　　者：陶天龙 刘书辉 柯志宏 王子杰 

机构地区：[1]武汉工程大学光电信息与能源工程学院、数理学院,武汉

出　　处：《传感器技术与应用》2025年第2期200-210,共11页Journal of Sensor Technology and Application

摘　　要：本文提出了一种基于游标效应的飞秒激光直写波导温度传感器。通过利用飞秒激光直写波导技术,在单模光纤(SMF)中制备了两个自由光谱范围(FSR)相近的马赫–曾德尔干涉仪(MZI)。光纤内的波导能够将光纤芯内传输的光耦合出来,并引导其沿着包层传输,最终再耦合回纤芯。波导内传输的光与纤芯内传输的光发生干涉,形成马赫–曾德尔干涉仪(MZI)。通过级联两个MZI,利用游标效应实现了温度灵敏度的放大。在进行传感MZI和级联传感器的温度实验后,发现传感器的温度灵敏度由−17.9 pm/℃提升至−94.6 pm/℃,灵敏度放大因子为5.2。该传感器具有结构紧凑、鲁棒性强的特点,展现出广泛的应用前景。This article proposes a femtosecond laser direct writing waveguide temperature sensor based on the vernier effect. Two Mach Zehnder interferometers (MZIs) with similar free spectral range (FSR) were fabricated in a single-mode fiber (SMF) using femtosecond laser direct writing waveguide technology. Light propagating in the fiber core is coupled out partially to the waveguide and traveling along a path in the fiber cladding region before being coupled back into the fiber core, thus forming an MZI. And temperature sensitivity amplification was achieved by cascading two MZIs to generate a vernier effect. Temperature experiments were conducted on both MZI and cascaded sensors, and the temperature sensitivity of the sensors was amplified from −17.9 pm/˚C to −94.6 pm/˚C, with an amplification factor of 5.2. Such a sensor has a compact structure, good robustness, and broad application prospects.

关 键 词：飞秒激光刻波导 马赫–曾德尔干涉仪 游标效应 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] TN253[自动化与计算机技术—控制科学与工程]