二氧化碲晶体混合低温等离子体表面改性技术制备光学薄膜  

Preparation of Optical Thin Film by Hybird-Low Temperature Plasma Surface Modification of Tellurium-Dioxide Crystal

作　　者：潘永刚 付秀华[2] 张程 Yonggang Pan;Xiuhua Fu;Cheng Zhang(Tianjin Mars Bird Technology Co., Ltd., Tianjin;Department of Optics and Electric Engineering, Changchun University of Science and Technology, ChangchunJilin)

机构地区：[1]天津煋鸟科技有限公司,天津 [2]长春理工大学光电工程学院,吉林长春

出　　处：《材料科学》2019年第1期25-31,共7页Material Sciences

摘　　要：由于二氧化碲(TeO2)晶体具有优良的声光特性,因此广泛应用于声光可调滤波器。本文以TeO2为衬底设计并研制了1300 nm^3400 nm波段超宽带减反射膜。但是由于TeO2晶体各向异性,从而导致膜层牢固度差,无法满足使用要求。文章采用混合低温等离子体表面改性技术来提高超宽带减反射光学薄膜在TeO2表面沉积的牢固度,通过实验验证,在相同薄膜沉积条件下,采用混合低温离子体处理过的TeO2薄膜附着力更好。有效解决TeO2表面薄膜附着力差的问题,满足附着力检测要求。Tellurium dioxide (TeO2) crystal for its excellent acousto-optic features was widely used in acousto-optic tunable filter. The 1300 - 3400 nm ultra-broad band anti-reflection film has been designed and fabricated on TeO2 acousto-optic crystal. Due to the TeO2 crystal anisotropy, it leads to poor adhesion of the film easy stripping. In this paper, the surface modification technology by hybird-low temperature plasma is used to improve the adhesion of ultra-wide band reduced re-flection optical film deposited on the surface of TeO2. Through experimental verification, under the same process conditions, the adhesion was better prepared by hybird-low temperature plasma. It solves the problem of stripping and meets the corresponding requirements of adhesion test.

关 键 词：光学薄膜 混合低温等离子体 TeO₂晶体 等离子体表面改性 声光可调谐滤波器 

分 类 号：TQ32[化学工程—合成树脂塑料工业]