云母纳米片与硅基底之间吸附能的鼓泡测量  

Adhesion Energy between Mica Nanolayers and Silicon Substrate Determined by a Blister Testing

作　　者：王炜 甄兴 高阳阳 侯丽珍 

机构地区：[1]湖南师范大学物理与电子科学学院,低微量子结构与调控教育部重点实验室,湖南 长沙

出　　处：《材料科学》2021年第5期511-519,共9页Material Sciences

摘　　要：云母纳米片(MNL)能显著改善硅(Si)微纳电子器件的电子输运性能,是一种非常有潜力的介电材料。MNL与接触的Si基底之间的界面吸附行为对于所构建的微纳电子器件的性能和力学稳定性极为关键,但是测试手段和技术上的困难导致我们对这类界面吸附行为的认知非常有限。本文采用了颗粒支撑的鼓泡方法测量了MNL与Si基底之间的界面吸附能,其测量结果为42.9 ±8.9 mJ/m2,接近范德华吸附的理论估算值~30 mJ/m2。同时,基于对比测试结果,本文还对颗粒支撑的鼓泡测试法在具体测量中所涉及到的力学模型的适用条件进行了讨论。这对提高鼓泡法在薄膜与基底之间界面吸附能的测量可靠性和准确性方面具有非常重要的指导和参考意义。Mica nanolayers (MNL) are a potential dielectric material, which can significantly improve the electron transport properties of Silicon (Si) micro-nano electronic devices. The adhesion energy between MNL and the underlying Si substrate plays a critical role on the operation and stability of the electronic devices, but is not well understood due to the challenges in the experimental testing and technical difficulties. In this study, the adhesion energy between MNL and Si substrate is de-termined by a particle-loaded blister test. The measured value of 42.9 ±8.9 mJ/m2 is close to the theoretical value of ~30 mJ/m2 predicted by van de Waals theory. The validity of the mechanical models related to the particle-loaded blister test was discussed, based on the comparative test results in our measurement. This will be of great benefit to improving the accuracy and reliability of the particle-loaded blister test for determining adhesion energy between thin films and substrates.

关 键 词：云母 纳米片 吸附能 硅 鼓泡法 

分 类 号：TB3[一般工业技术—材料科学与工程]