Enhancing Mechanical Stability of Nano-Structured Anti-Reflection Coatings  

作　　者：Behnam Kheyraddini Mousavi[1] Tito Busani[1] Mani Hossein Zadeh[1] Steven Roy Julien Brueck[1] 

出　　处：《Journal of Applied Mathematics and Physics》2020年第2期247-258,共12页应用数学与应用物理（英文）

摘　　要：Periodic Nanostructured anti-reflection coatings (NALs) are a promising option for enhancing transmission of coherent light without inducing scattering. We’ve found that reducing the height of NALs below a critical value to enhance mechanical stability can highly reduce the transmission efficiency. Here, using Rigorous Couples Wave Analysis (RCWA), we find the minimum height for over 99% transmission and effect of height on transmission bandwidth. Then, during a one-step plasma etching, two samples with different heights have been generated and their efficiency is evaluated using RCWA.Periodic Nanostructured anti-reflection coatings (NALs) are a promising option for enhancing transmission of coherent light without inducing scattering. We’ve found that reducing the height of NALs below a critical value to enhance mechanical stability can highly reduce the transmission efficiency. Here, using Rigorous Couples Wave Analysis (RCWA), we find the minimum height for over 99% transmission and effect of height on transmission bandwidth. Then, during a one-step plasma etching, two samples with different heights have been generated and their efficiency is evaluated using RCWA.

关 键 词：MAXIMUM TRANSMISSION MECHANICAL Stability REFLECTION Laser NANO-STRUCTURE 

分 类 号：TG1[金属学及工艺—金属学]