Fabrication of Polarization Control Devices Using Metal Grating Structures  

作　　者：Atsushi Motogaito Yukino Hayashi Akinori Watanabe Kazumasa Hiramatsu Atsushi Motogaito;Yukino Hayashi;Akinori Watanabe;Kazumasa Hiramatsu(Graduate School of Engineering, Mie University, Tsu, Japan)

机构地区：[1]Graduate School of Engineering, Mie University, Tsu, Japan

出　　处：《Optics and Photonics Journal》2022年第9期201-213,共13页光学与光子学期刊（英文）

摘　　要：A polarization control device was developed using a plasmonic metasurface with the aim of achieving the desired polarization state. In this study, the Ag metal grating structure was fabricated as a plasmonic metasurface by electron beam lithography and a lift-off process. The phase difference of the fabricated sample was 21.0°. This value is almost consistent with the simulation (24.0°). Then, the transmission and phase difference is dependent on the structural parameter. Because of the propagation of surface plasmon polariton at the interface between Ag and SiO₂ or Ag and air, it is believed that the transmittance and the phase difference for TM polarized light can be controlled by the structural parameters. By plotting on the Poincaré sphere after calculating the S-parameter by simulation, it is clear that the arbitrary polarization status can be controlled by the structural parameter.A polarization control device was developed using a plasmonic metasurface with the aim of achieving the desired polarization state. In this study, the Ag metal grating structure was fabricated as a plasmonic metasurface by electron beam lithography and a lift-off process. The phase difference of the fabricated sample was 21.0°. This value is almost consistent with the simulation (24.0°). Then, the transmission and phase difference is dependent on the structural parameter. Because of the propagation of surface plasmon polariton at the interface between Ag and SiO₂ or Ag and air, it is believed that the transmittance and the phase difference for TM polarized light can be controlled by the structural parameters. By plotting on the Poincaré sphere after calculating the S-parameter by simulation, it is clear that the arbitrary polarization status can be controlled by the structural parameter.

关 键 词：Surface Plasmon Metal Grating Polarization Control Plasmonic Metasurface 

分 类 号：O43[机械工程—光学工程]