Getters: From Classification to Materials Design  

作　　者：Konstantin Chuntonov Alexander Atlas Janez Setina Gary Douglass Konstantin Chuntonov;Alexander Atlas;Janez Setina;Gary Douglass(Institute of Metals and Technology, Ljubljana, Slovenia;NanoShell Consulting, Migdal Haemek, Israel;Institute of Metals and Technology, Ljubljana, Slovenia;Agile Chemistry, Inc., Elmhurst, IL, USA)

机构地区：[1]Institute of Metals and Technology, Ljubljana, Slovenia [1]NanoShell Consulting, Migdal Haemek, Israel [2]Institute of Metals and Technology, Ljubljana, Slovenia [3]Agile Chemistry, Inc., Elmhurst, IL, USA

出　　处：《Journal of Materials Science and Chemical Engineering》2016年第3期23-34,共12页材料科学与化学工程（英文）

摘　　要：The demand for getters with high sorption efficiency has generated a need for resources to assist in qualification of getter materials for their practical use. This paper discusses innovative steps which should provide a dramatic improvement in the selection and application of getter technologies used in various processes. The first step was to build a natural classification of chemisorbents, from which we obtain a corresponding order of suitability related to known getter products. The classification system suggested by the authors is based on criteria which are directly connected with the sorption behavior of the material. This has lead to the challenge of developing of a computing algorithm for characterization of sorption properties of getter materials and for solving the inverse problem—the problem of designing a chemisorbent based on the requirements of a fully realized application. The employment of the new methodology is demonstrated in the example of the calculations supporting the selection of getter films for MEMS.The demand for getters with high sorption efficiency has generated a need for resources to assist in qualification of getter materials for their practical use. This paper discusses innovative steps which should provide a dramatic improvement in the selection and application of getter technologies used in various processes. The first step was to build a natural classification of chemisorbents, from which we obtain a corresponding order of suitability related to known getter products. The classification system suggested by the authors is based on criteria which are directly connected with the sorption behavior of the material. This has lead to the challenge of developing of a computing algorithm for characterization of sorption properties of getter materials and for solving the inverse problem—the problem of designing a chemisorbent based on the requirements of a fully realized application. The employment of the new methodology is demonstrated in the example of the calculations supporting the selection of getter films for MEMS.

关 键 词：Getter Classification Chemisorbent Design Sorption Efficiency MEMS Critical Sorption Rate 

分 类 号：TF1[冶金工程—冶金物理化学]