Physical Alloying of Plasma Metallization Carbide Nanocomposite Coating by Allotropic Carbon Nanostructures  

作　　者：Philipp I. Vysikaylo Valeriy S. Mitin Alexey A. Yakushkin Philipp I. Vysikaylo;Valeriy S. Mitin;Alexey A. Yakushkin(Moscow Radiotechnical Institute of Russian Academy of Sciences, Moscow, Russia)

机构地区：[1]Moscow Radiotechnical Institute of Russian Academy of Sciences, Moscow, Russia

出　　处：《Journal of Surface Engineered Materials and Advanced Technology》2021年第1期1-13,共13页表面工程材料与先进技术期刊（英文）

摘　　要：The fundamental scientific problem for micro- and nano-electronics has been solved—methods for creating and investigating properties of physically doped materials with spatially inhomogeneous structure at the micro- and nano-meter scale have been developed. For the application of functional nanocomposite film coatings based on carbides of various transition metals structured by nanocarbon, for the first time in the world, we developed a new technique for their plasma deposition on a substrate without the use of reaction gases (hydrocarbons such as propane, acetylene, etc.). We have created nanostructured film materials, including those with increased strength and wear resistance, heterogeneous at the nanoscale, physically doped with nanostructures—quantum traps for free electrons. We learned how to simultaneously spray (in a plasma of a stationary magnetron discharge) carbides and graphite from a special mosaic target (carbide + carbon) made mechanically. As a result of such stationary sputtering of carbides and carbon, plasma nanostructured coatings were obtained from nanocarbides, metal nanocrystals and nanocarbon. Our design of such a target made it possible to intensively cool it in the magnetron body and spray its parts (carbide + carbon) simultaneously with a high power density of a constant plasma discharge—in the range of values from 40 W/cm² to 125 W/cm². Such sputtering with a change in the power or the initial relative surface areas of various parts of the mosaic target (carbon and carbide) made it possible to change the average density of carbide, metal and carbon in a nanostructured (nanocarbon and metal nanostructures) coating. The changed relative density of various components of the nanocomposite (nanostructures of carbide, metal, and carbon in the form of graphite) significantly affected the physical properties of the nanocomposite coating. The creating method of multiphase nanostructured composite coatings (based on carbides of transition metals) with high hardness ofThe fundamental scientific problem for micro- and nano-electronics has been solved—methods for creating and investigating properties of physically doped materials with spatially inhomogeneous structure at the micro- and nano-meter scale have been developed. For the application of functional nanocomposite film coatings based on carbides of various transition metals structured by nanocarbon, for the first time in the world, we developed a new technique for their plasma deposition on a substrate without the use of reaction gases (hydrocarbons such as propane, acetylene, etc.). We have created nanostructured film materials, including those with increased strength and wear resistance, heterogeneous at the nanoscale, physically doped with nanostructures—quantum traps for free electrons. We learned how to simultaneously spray (in a plasma of a stationary magnetron discharge) carbides and graphite from a special mosaic target (carbide + carbon) made mechanically. As a result of such stationary sputtering of carbides and carbon, plasma nanostructured coatings were obtained from nanocarbides, metal nanocrystals and nanocarbon. Our design of such a target made it possible to intensively cool it in the magnetron body and spray its parts (carbide + carbon) simultaneously with a high power density of a constant plasma discharge—in the range of values from 40 W/cm² to 125 W/cm². Such sputtering with a change in the power or the initial relative surface areas of various parts of the mosaic target (carbon and carbide) made it possible to change the average density of carbide, metal and carbon in a nanostructured (nanocarbon and metal nanostructures) coating. The changed relative density of various components of the nanocomposite (nanostructures of carbide, metal, and carbon in the form of graphite) significantly affected the physical properties of the nanocomposite coating. The creating method of multiphase nanostructured composite coatings (based on carbides of transition metals) with high hardness of

关 键 词：Physical Alloying Plasma Metal Coating Coefficient of Dry Friction Charged Layer 

分 类 号：TB3[一般工业技术—材料科学与工程]