国家自然科学基金(50971011)

作品数：5被引量：6H指数：1
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相关期刊：《Science China(Physics,Mechanics & Astronomy)》《Chinese Physics B》《Progress in Natural Science:Materials International》更多>>
相关主题：PRECISIONFABRICATIONELECTRONWIDTHCOULOMB更多>>
相关领域：一般工业技术理学电子电信金属学及工艺更多>>
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Improvement of fabrication precision of focused ion beam by introducing simultaneous electron beam被引量：3
《Progress in Natural Science:Materials International》2010年第1期111-115,共5页Hu LUO,Ran JING,Yi-min CUI,Hai-long WANG,Rong-ming WANG Key Laboratory of Micro-Nano Measurement-Manipulation and Physics,Ministry of Education, Department of Physics,Beijing University of Aeronautics and Astronautics,Beijing 100191,China 
Project(50971011) supported by the National Natural Science Foundation of China;Project(1102025) supported by Beijing Natural Science Foundation;Project(20091102110038) supported by the Research Fund for the Doctoral Program of Higher Education of China
The introduction of electron beam(EB)brings features of both simultaneous observation of ion milling process and improvement of ion-milling accuracy in a dual beam system consisting of focused ion beam(FIB)and scannin...
关键词：FABRICATION line WIDTH numerical simulation SIMULTANEOUS ELECTRON beam COULOMB interaction 
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