国家自然科学基金(Y1090239)

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Echelle dif fraction grating based high-resolution spectrometer-on-chip on SiON waveguide platform被引量:1
《Chinese Optics Letters》2013年第3期69-72,共4页马骁 何建军 李明宇 
supported by the Zhejiang Provincial Natural Science Foundation of China(No.Y1090239);the National "863" Program of China(No.2011AA010305);the Fundamental Research Funds for the Central Universities of China(Nos.2012QNA5015 and 2012QNA5039)
An echelle diffraction grating based high-resolution spectrometer-on-chip on silicon oxynitride (SiON) waveguide platform operated at a wavelength range of 850 nm is demonstrated. The chip comprises 120 output waveg...
关键词:Diffraction Silicon nitride SPECTROMETERS Waveguides 
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