supported by the Zhejiang Provincial Natural Science Foundation of China(No.Y1090239);the National "863" Program of China(No.2011AA010305);the Fundamental Research Funds for the Central Universities of China(Nos.2012QNA5015 and 2012QNA5039)
An echelle diffraction grating based high-resolution spectrometer-on-chip on silicon oxynitride (SiON) waveguide platform operated at a wavelength range of 850 nm is demonstrated. The chip comprises 120 output waveg...