supported by the National Natural Science Foundation of China(No.51135009)
Nanopositioning stage based on piezoelectric(PZT)actuators and flexure mechanisms has been widely used in dual-stage.Its favorable positioning accuracy and dynamic response can guarantee the high performance of the du...
Projects(51135009)supported by the National Natural Science Foundation of China
This work was focused on the model-based design method of two-axis four-actuator(TAFA) fast steering mirror system(FSM), in order to improve the design efficiency. The structure and operation principle commonality of ...