ATOMIC-SCALE

作品数：90被引量：220H指数：7
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相关领域：一般工业技术理学更多>>
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相关机构：上海大学更多>>
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相关基金：国家自然科学基金国家重点基础研究发展计划中国博士后科学基金高等学校学科创新引智计划更多>>
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  • 期刊=Progress in Natural Science:Materials Internationalx
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Thermal atomic layer etching: Mechanism, materials and prospects
《Progress in Natural Science:Materials International》2018年第6期667-675,共9页Chang Fang Yanqiang Cao Di Wu Aidong Li 
supported by the Natural Science Foundation of China (51571111, 51721001, 51802150);Jiangsu Province (BK2016230, and BK20170645);The grant from the State Key Program for Basic Research of China (2015CB921203);the general grant from the China Postdoctoral Science Foundation (2017M611778);support from the Fundamental Research Funds for the Central Universities (021314380075);open project of NLSSM (M30038)
In the semiconductors and related industries, the fabrication of nanostructures and nanopatterns has become progressive demand for achieving near-atomic accuracy and selectivity in etching different materials, particu...
关键词：THERMAL ATOMIC LAYER ETCHING ATOMIC LAYER deposition Self-limiting Reaction MECHANISM ATOMIC-SCALE precision 
Atomic-scale segregation behavior of Sn/Ti and O at Σ3[1ī0](111) grain boundary in niobium
《Progress in Natural Science:Materials International》2016年第2期152-157,共6页Zenghui Liu Jiaxiang Shang 
supported by the National Natural Science Foundation of China (NSFC) with Grant no. 51071011
First-principle calculation was performed to illustrate the atomic arrangement and segregation behavior of Sn/Ti and O in Σ3[1ī0](111) grain boundary, and the interaction of oxygen interstitials with Sn/Ti atoms on...
关键词：Grain bounday SEGREGATION FIRST-PRINCIPLES NIOBIUM alloys ALLOYING elements 
Atomic-scale computer simulation for ternary alloy Ni-Cr-Al during early precipitation process被引量：4
《Progress in Natural Science:Materials International》2005年第7期656-660,共5页CHUZhong CHENZheng WANGYongxin LUYanli LIYongsheng 
Supported by the National Natural Science Foundation of China (Grant No. 50071046)
The aging behaviors of Ni-Cr-Al ternary alloy are studied at temperature 873 K based on the mean-field theory, and the early precipitation process is simulated at atomic-scale with microscopic phase-field model. The p...
关键词：microscope phase-field model NI-CR-AL PRECIPITATION ordering parameter SIMULATION 
Atomic-scale computer simulation for early precipitation process of Ni_(75) Al_x V_(25-x) alloy with intermediate Al composition
《Progress in Natural Science:Materials International》2005年第4期351-357,共7页ZHAOYuhong JUDongying CHENZheng HOUHua 
SupportedbytheNationalNaturalScienceFoundationofChina (GrantNo .5 0 0 710 46)
The microscopic phase-field approach is applied to model the early precipitation process of Ni75AlxV25-x alloy. Without any prior assumptions, this model can be used to simulate the temporal evolution of arbitrary mor...
关键词：computer simulation early precipitation mechanism phase field model Ni75AlxV25-x alloy 
Atomic-scale computer simulation for early precipitation process of Ni_(75) Al_(10) V_(15) alloy被引量：4
《Progress in Natural Science:Materials International》2004年第3期241-246,共6页ZHAOYuhong CHENZheng WANGYongxin LUYanli 
SupportedbytheNationalNaturalScienceFoundationofChina (GrantNo .5 0 0 710 46)
The kinetic model for a ternary system is introduced based on the microscopic diffusion form of the phase field equations for a binary alloy. The equation is solved in the reciprocal space. This model is used to inves...
关键词：early precipitation process computer simulation Ni    75  Al    10  V    15   alloy. 
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