Project supported by National Hi-Tech R&D Program of China(863Program,2011AA03A409);Major State Basic Research Development Program of China(973Program,2012BA01207)
The thermo physical parameters of Tm vapor and the range of sublimation temperature were determined by vapor pressure of metal Tm, and a 2-D axis-symmetric heat transfer model was developed to investigate the temperat...
Project supported National Natural Science Foundation of China(60025409 and 50472068);National"863"High Technology Plan(2001AA311080)
High-resolution X-ray diffractometry(HRXRD)was used to assess the quality of 6H-SiC crystals grown by sublimation method.The results show the occurrence of low-angle grain boundaries(LB)is close relative to the inclin...