the National Major Research and Development Program(No.2018YFB2200200/2018YFB2200201);National Science Fund for Distinguished Young Scholars(61725503);National Natural Science Foundation of China(NSFC)(91950205,61961146003,92150302,62105283,62205286);Zhejiang Provincial Natural Science Foundation(LD19F050001);Zhejiang Provincial Major Research and Development Program(No.2021C01199);Leading Innovative and Entrepreneur Team Introduction Program of Zhejiang(2021R01001);the Fundamental Research Funds for the Central Universities.The authors thank the Westlake Center for Micro/Nano Fabrication for the partial facility support。
Recently,high-performance thin-film lithium niobate optical modulators have emerged that,together with advanced multiplexing technologies,are highly expected to satisfy the ever-growing demand for high-capacity optica...