the priority support provided by the National Natural Science Foundation of China(No.50235030);the National Development Scheme of Kev Fundamental Research(National“973”Proiect)of China(No.G1999065009);“863”Project(No.2003AA331130).
The mechanical integrity and reliability of coated devices are strongly affected by the residual stresses in thin films and coatings. However, due to the metallurgical complexity of materials, it is rather difficult t...