supported by Shenzhen Technology Projects(No.ZDSYS201707280904031);the China Postdoctoral Science Foundation(No.2022M710977)。
An experimental study on the quasi-neutral beam extracted by a neutralizer-free gridded ion thruster prototype was presented.The prototype was designed using an inductively coupled plasma source terminated by a double...
supported by National Natural Science Foundation of China(No.11375040);the Important National Science&Technology Specific Project of China(No.2011ZX02403-001)
Abstract A hybrid sheath model, including a fluid model and a Monte Carlo (MC) method, is proposed to study ion energy distributions (IEDs) driven by a radiofrequency (RF) with a tailed pulse-bias on an insulati...
supported by National Science Foundation of China (No.10175014)
The tuned substrate self-bias in a radio-frequency inductively coupled plasma is controlled by varying the impedance of an external tuning LCR (inductor, capacitor and resistor) network inserted between the substrat...
supported by the Chinese Ministry of Education,the Chinese National Natural Science Foundation(Grant Nos.1023 5010 and 1033 5060);grants from the Chinese Academy of Sciences and by the JSPS-CAS Core University Program in the field of Plasma and Nuclear Fusion.
Based on the single biasing electrode experiments to optimize the confinement of plasma in the device of KT-5C tokamak, dual-biasing electrodes were inserted into the KT5C plasma for the first time to explore the enha...
National Natural Science Foundation of China (No 10175014)
The tuned substrate self-bias in an rf inductively coupled plasma source is controlled by means of varying the impedance of an external LC network inserted between the substrate and the ground. The influencing paramet...
The radio frequency (rf) self-bias of the substrate in a rf inductively coupled plasma is controlled by means of varying the impedance of an external LC network inserted between the substrate and the ground. Experimen...