微光机电系统加速度计技术现状与应用展望  

Technology Status and Application Outlook of Micro-Opto-Electro-Mechanical System Accelerometers

作　　者：朱启举[1] 王小旭[2] 梅春波 杨鹏翔[1] 卢乾波 ZHU Qiju;WANG Xiaoxu;MEI Chunbo;YANG Pengxiang;LU Qianbo(Xi’an Modern Control Technology Research Institute,Xi’an 710065,China;School of Automation,Northwestern Polytechnical University,Xi’an 710072,China;Institute of Flexible Electronics,Northwestern Polytechnical University,Xi’an 710072,China)

机构地区：[1]西安现代控制技术研究所,西安710065 [2]西北工业大学自动化学院,西安710072 [3]西北工业大学柔性电子研究院,西安710072

出　　处：《前瞻科技》2022年第4期81-98,共18页Science and Technology Foresight

摘　　要：微光机电系统(MOEMS)加速度计具有精度高、抗电磁干扰、环境适应性好、可靠性高及易小型化的特点,是未来惯性仪表的重要发展方向。根据光学检测原理对现有微光机电系统加速度计进行了分类:基于直接光强调制、基于光的波动性、基于光与物质相互作用的微光机电系统加速度计;基于测量原理和典型案例,分析了这3类微光机电系统加速度计的优缺点和适用场景;结合微光机电系统加速度计的研究进展,提出了其未来发展的趋势和重点方向。A micro-opto-electro-mechanical system(MOEMS)accelerometer features high precision,electromagnetic interference resistance,good adaptability to the environment,high reliability,and easy miniaturization,which is the major development trend of inertial instruments.According to the optical measurement principle,this paper divides MOEMS accelerometers into three categories,which are based on the direct intensity modulation(IM),the undulatory property of light,and the light–matter interaction separately.Following a brief introduction to the measurement principles and typical cases,we systematically analyze the merits and demerits of the three accelerometers,as well as their potential application scenarios.Given the research progress in MOEMS accelerometers,we also present their development tendencies.

关 键 词：加速度计 微光学 微光机电系统 高精度加速度测量 

分 类 号：TH824.4[机械工程—仪器科学与技术]