大口径连续位相板拼接检测技术研究  

Research on Sub-aperture Stitching Ttechnology of Large-aperture Continuous Phase Plates

作　　者：柴文松 季鹏 王波[1] 张海涛[2] 李铎 CHAI Wen-song;JI Peng;WANG Bo(School of Mechatronics Engineering Harbin Institute of Technology,Harbin 150001;State Key Laboratory of Applied Optics,Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033)

机构地区：[1]哈尔滨工业大学机电工程学院,哈尔滨150001 [2]中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室,长春130033

出　　处：《航空精密制造技术》2022年第5期6-11,共6页Aviation Precision Manufacturing Technology

基　　金：国家自然科学基金资助项目(51905130);应用光学国家重点实验室开放基金课题(SKLAO2002100IA05)

摘　　要：区别于传统平面拼接检测方式,将空间六自由度应用于连续位相板拼接检测,建立数学模型,通过最小二乘的方式实现孔径拼接融合,完成连续位相板的检测,恢复其波前特征。本文通过仿真分析该方法的精度,并搭建机械检测装置完成子孔径数据采集,对加工的连续位相板进行实验验证。通过仿真分析,拼接面形误差RMS约为0.0006λ,实验结果显示100mmCPPs,拼接面形误差RMS约为0.0143λ,子孔径拼接波前数据结果与全口径检测数据可以达到很好的一致性。Different from the sub-aperture stitching of conventional planar optics,six degrees of freedom(DOFs)in space should be completely incorporated to misalignment-induced error and the measurement accuracy was improved.The sub-aperture stitching mathematical model considering six DOFs is established with the least-square method to recover its full-aperture wavefront feature.The stitching accuracy was investigated with the simulation,which indicates that the stitching accuracy is about RMS 0.0006λ(λ=632.8 nm).The experimental verification was carried out in our self-developed sub-aperture stitching system.For the CPP sample with the size of 100 mm 100 mm,the stitching accuracy is achieved to be about RMS 0.0143λ.The results of sub-aperture stitched wavefront data are in good agreement with the full aperture detection data.

关 键 词：光学测量 大口径连续位相板 子孔径拼接 波前干涉检测 

分 类 号：O435.2[机械工程—光学工程]