棱锥式角度传感器原理研究与设计  

Principle research and design of pyramid angle sensor

作　　者：张白[1] 刘杰 韩鑫洋 周春艳[1] Zhang Bai;Liu Jie;Han Xinyang;Zhou chunyan(School of Electrical Information Engineering,North Minzu University,Yinchuan 750021,China)

机构地区：[1]北方民族大学电气信息工程学院,银川750021

出　　处：《电子测量技术》2022年第24期36-42,共7页Electronic Measurement Technology

基　　金：国家自然科学基金(52065002);宁夏自然科学基金(2022AAC02045)项目资助

摘　　要：角度作为最基本的几何量之一,其精度直接影响制造业的产品质量。针对光栅传感器刻线数难以进一步提高的技术瓶颈,本文提出了一种基于正棱锥的角度传感器测量系统。通过正棱锥反射结构,将多束激光以45°入射至正棱锥棱面,并结合多个错位设置的位置敏感探测器,实现了角度的连续测量。实验结果表明,基于正棱锥的角度传感器原理正确,在1.2°的量程内,单个位置敏感探测器测量误差为±3.5″;四个位置敏感探测器连续交替测量时,在4.8°量程内,测量误差为±4″。本文提出的棱锥式角度传感器无需进行栅式刻线,精度与位置敏感探测器的距离以及其测量精度有关,随着位置敏感探测器的精度提升,系统的测量精度必然可以进一步提高。As one of the most basic geometric quantities,the accuracy of angle directly affects the product quality of manufacturing industry.Aiming at the technical bottleneck that the number of scribed lines of grating sensor is difficult to be further improved,an angle sensor measurement system based on pyramid is proposed in this paper.Through the regular pyramid reflection structure,multiple laser beams are incident on the regular pyramid prism at 45°,and combined with multiple position sensitive detectors set in dislocation,the continuous measurement of angle is realized.The experimental results show that the principle of the angle sensor based on pyramid is correct.Within the range of 1.2°,the measurement error of a single position sensitive detector is±3.5″;When four position sensitive detectors measure continuously and alternately,the measurement error is±4″within the range of 4.8°.The pyramid angle sensor proposed in this paper does not need grid scribing,and the accuracy is related to the distance of the position sensitive detector and its measurement accuracy.With the improvement of the accuracy of the position sensitive detector,the measurement accuracy of the system is bound to be further improved.

关 键 词：角度测量 位置敏感探测器 正棱锥 交替测量 

分 类 号：TH712[机械工程—测试计量技术及仪器] TP212[机械工程—仪器科学与技术]