ZrN系列薄膜的研究进展  

Development of Research in ZrN Series Film

作　　者：李宇恒[1] 胡社军[2] 曾鹏[1] 吴健[1] 

机构地区：[1]广东工业大学 [2]华南师范大学

出　　处：《工具技术》2007年第7期7-12,共6页Tool Engineering

摘　　要：综述了近年来ZrN系列薄膜的研究现状,描述了ZrN薄膜的重要性质,介绍了以ZrN薄膜为基础的多层膜和复合膜的研究状况,分析了制备方法及工艺条件对薄膜的影响,并展望了ZrN薄膜未来的研究方向。The resent development of the research in the film series of ZrN was summarized and the several initial properties of the ZrN film were described. In addition,the multi-layer and the composite films based on the single ZrN film were also analyzed. The influence of preparation methods and technological conditions on the films was analyzed. At last,the future development trend of ZrN film was presented.

关 键 词：ZRN 薄膜 多层 复合 

分 类 号：TB381[一般工业技术—材料科学与工程]