基于MEMS工艺的集成光纤连接器  

MEMS-Based Integrated Optical Fiber Connector

作　　者：蔡玉丽[1] 丁桂甫[1] 戴旭涵[1] 顾东华[1] 姚锦元[1] 张丹[1] 

机构地区：[1]微米/纳米加工技术国家重点实验室薄膜与微细技术教育部重点实验室,上海200030

出　　处：《电子器件》2007年第2期426-429,共4页Chinese Journal of Electron Devices

基　　金：上海市光科技专项课题资助(DZ46105008);国家自然科学基金资助(10377009)

摘　　要：一种基于MEMS技术的新型光纤连接器,在硅V型槽上方集成制造电沉积镍薄膜金属盖板,其两端喇叭口形导引通道方便光纤插拔,中间平直部分的夹持通道实现光纤的定位和精确自对准.该器件体积小巧、可集成制造并且重复性好,测试的插入损耗值小于0.3dB.对此自适应式可集成制造光纤连接器的结构设计和制作工艺作了着重介绍.An optical fiber connector based on MEMS technology is presented.Nickel thin film cover plate is integrated manufactured above the silicon V-shaped groove.The bell-mouthed crimping channel facilitates the insertion and pulling of optical fiber.The clamping channel of the middle flatly segment makes the precise position and self splicing come true.The devices are not only small and integrated manufacturable but well reproducible as well.The insertion loss is less than 0.3 dB.The microstructure design keys an...

关 键 词：光纤元件 光纤连接器 MEMS 集成制造 自适应盖板 

分 类 号：TN253[电子电信—物理电子学]