基于MEMS工艺的碳纳米管(碳纳米纤维)铜微异型触点  

MEMS-Based Carbon Nanotube and Carbon Nanofiber Copper Micro Special Electric Contact

作　　者：王裕超[1] 丁桂甫[1] 吴惠箐[1] 汪红[1] 姚锦元[1] 杨春生[1] 

机构地区：[1]上海交通大学微纳科学技术研究院微米纳米加工技术国家重点实验室薄膜与微细技术教育部重点实验室,上海200030

出　　处：《电子器件》2007年第5期1542-1546,共5页Chinese Journal of Electron Devices

基　　金：上海市纳米专项基金资助(0452nm049;05nm05004);上海市自然基金资助(05ZR14076)

摘　　要：一类为保护MEMS微继电器、提高它们使用寿命,而设计生产的微异型触点.该类微异型触点利用MEMS工艺,对铜基碳纳米管及碳纳米纤维复合电镀层进行细微图形化加工而成.一系列测试表明,铜基碳纳米管及碳纳米纤维复合电镀层本身具有良好的电接触性能,而利用MEMS工艺表面细微图形化加工后的微异型触点,比未经图形化加工的复合电镀层及纯铜触点具有更好耐电弧磨损性能.To protect MEMS micro relay,this paper designed and produced a new kind of micro special electric contact.Carbon nanotube and carbon nanofiber copper composite films were processed by MEMS fabrication to achieve these micro special electric contacts.After series testing,it was found that carbon nanotube and carbon nanofiber copper composite films got excellent electric contact properties,and the arc erosion characteristic of micro special electric contact processed by MEMS fabrication was better than that o...

关 键 词：电接触 异型触点 MEMS 碳纳米管 碳纳米纤维 

分 类 号：TN405[电子电信—微电子学与固体电子学]