GaN薄膜光学常数的椭圆偏振光谱研究  

The optical constants of GaN film investigated by spectroscopic ellipsometry

作　　者：俞金玲[1] 姜伟[1] 李书平[1] 刘达艺[1] 康俊勇[1] 

机构地区：[1]福建省半导体材料及应用重点实验室厦门大学物理系,福建厦门361005

出　　处：《福州大学学报（自然科学版）》2007年第S1期15-18,共4页Journal of Fuzhou University(Natural Science Edition)

基　　金："863"计划资助项目(2006AA03A110);基础科研资助项目(A1420060155);国家自然科学基金资助项目(60336020);厦门市科技计划资助项目(3502Z20063001)

摘　　要：采用椭圆偏振光谱法,在1.5~6.5 eV光谱范围研究了纤锌矿结构GaN外延薄膜.通过物理模型建立和光谱拟合得到了GaN外延薄膜的厚度和光学常数.所得厚度值与扫描电子显微镜测量的结果相差仅为0.4%.表明所采用的模型和Cauchy吸收色散表式适用于GaN薄膜.进一步采用四相逐点拟合算法得到更全面更准确的GaN薄膜光学常数.A wurtzite GaN thin film was investigated by spectroscopic ellipsometry(SE) in the spectrum range of 1.5~6.5eV.The thickness and optical constants were obtained by building physical structure model and spectral fitting.The difference of the thickness obtained by SE and by scanning electron microscope(SEM) is only 0.4%,which shows that the model and Cauchy absorbent formula are suitable to study the properties of GaN.Furthermore,the four-phase point-by-point fitting model was used to obtain the optical cons...

关 键 词：椭圆偏振光谱 GAN 薄膜 光学常数 色散模型 

分 类 号：O484.41[理学—固体物理]