UFPA探测单元的热学分析  

Thermodynamic Analysis of UFPA Detector Pixel

作　　者：张五星[1] 钟志有[1] 尹盛[1] 刘陈[1] 王长安[1] 邹雪城[1] 

机构地区：[1]华中科技大学电子科学与技术系,湖北武汉430074

出　　处：《半导体光电》2003年第3期168-171,共4页Semiconductor Optoelectronics

基　　金：国防预研基金资助项目

摘　　要：用有限元方法对非致冷红外焦平面阵列(UFPA)的探测单元进行了有限元热分析,分析结果表明,微桥的结构可以显著地影响探测单元的热学性能,而且还得到了钛酸锶钡(BST)薄膜与红外辐射强度之间的线性关系、热饱和时间以及降温过程。利用得到的结果对探测单元尺寸进行了优化,制备出介电量热型UFPA探测单元,并分析了输出信号比期望值小的原因。Thermal properties of uncooled focal plane array (UFPA) detector pixel is analyzed by finite element analysis (FEA) method. The results show that the structure of detector pixel is critical to its thermal properties. The process of temperature decrement and the relation between BST thin film and the infrared radiation power are also analyzed, followed by calculation of the max temperature increment of BST thin film. The UFPA detector pixel is fabricated and the degradation of signal output is observed and a...

关 键 词：有限元 非致冷红外焦平面阵列 铁电薄膜 钛酸锶钡 

分 类 号：TN215[电子电信—物理电子学]