透明导电薄膜ZnO∶Al的组织结构分析  

Analysis on the Microstructure of Transparent Conductive Oxide ZnO:Al Thin Films

作　　者：殷胜东[1] 马勇[1] 王楠[1] 

机构地区：[1]重庆师范大学物理学与信息技术学院,重庆400045

出　　处：《山西师范大学学报（自然科学版）》2006年第2期32-36,共5页Journal of Shanxi Normal University(Natural Science Edition)

基　　金：重庆市教委资助项目(040810)

摘　　要：Zno∶Al(ZAO)透明导电薄膜具有高的载离子浓度和大的光学禁带宽度,因而具有优异的电学和光学性能,极具应用价值.本文研究了ZAO薄膜的微观组织结构、化学成分、及其应用前景.Transparent conductive ZnO∶Al(ZAO) thin films are semi-conductor oxides with both high carrier concentration and large optical band gap.ZAO films have outstooding electrical and optical properties,and are emerging as a most potential alternative candidate for transparent conducting material.The preparation status of ZAO films is introduced.The micro-structure and their applicating prospect and the proposal for the future research are described.

关 键 词：ZAO薄膜 形态结构 化学成份 应用前景 

分 类 号：TB383[一般工业技术—材料科学与工程]