折叠弹簧式MEMS水平扭转微镜的设计与分析  

Design and analysis of a MEMS horizontal torsion micro mirror with folded springs

作　　者：张昱[1] 潘武[1] 

机构地区：[1]重庆邮电学院微光机电系统研究所,重庆400065

出　　处：《光学精密工程》2005年第z1期81-85,共5页Optics and Precision Engineering

基　　金：重庆市教委科学技术研究项目(No.020508);重庆邮电学院博士科研基金项目(No.A2002-36)

摘　　要：设计了带有折叠弹簧的静电驱动光开关水平扭转微镜,利用折叠弹簧代替直扭梁,增加扭梁的长度,有效降低微镜驱动电压。微型铰链结构使微镜保持在单一扭转工作模式下,其弯曲模式的影响可以忽略。利用MATLAB 7.0进行仿真分析,获得微镜驱动电压与扭梁长度的关系曲线。利用ANSYS 8.0获得了折叠弹簧式微镜结构的模态分析和谐响应分析结果,其工作模态频率约为1.77 kHz,远低于其他非工作模态频率。微镜结构的谐振频率约为1.8 kHz,能满足MEMS光开关对开关响应时间的要求。A horizontal torsion micro mirror with folded springs for MEMS optical switch driven by an electrostatic actuator is designed in this paper.The total length of torsion beams grows longer and driving voltage can be effectively decreased because the straight torsion beams are replaced by the folded springs.The micro mirror with double micro hinges works at the torsion mode,and the bending mode is neglected.The structure of the micro mirror is analyzed and simulated by using MATLAB(7.0),and the relation between driving voltage and the length of the torsion beams is obtained.The mode and harmonic response of the micro mirror are analyzed by using ANSYS 8.0.The frequency of the micro mirror's work mode is approximately 1.77 kHz,which is far smaller than the other vibration modes'.The resonance frequency of the micro mirror is 1.8 kHz,which could meet the requests of the optical switch.

关 键 词：光开关 微镜 驱动电压 折叠弹簧 有限元分析 

分 类 号：TN253[电子电信—物理电子学]