碲镉汞物理与化学钝化界面的AES研究  

PHYSICALLY AND CHEMICALLYPASSIVATED INTERFACE OFHgCdTe STUDIED BY AES

作　　者：史伟民[1] 李冬梅[1] 钱永彪[1] 居建华[1] 王林军[1] 闵嘉华[1] 桑文斌[1] 吴汶海[1] 

机构地区：[1]上海大学材料科学与工程学院,上海201800

出　　处：《红外与毫米波学报》2002年第z1期23-27,共5页Journal of Infrared and Millimeter Waves

摘　　要：采用化学和物理方法分别在Ｈｇ１－ｘＣｄｘＴｅ(ＭＣＴ)表面制备了阳极氟化膜、ＣｄＴｅ、ＺｎＳ和类金刚石薄膜(ＤＬＣ)钝化层．采用俄歇光谱(ＡＥＳ)和红外透射光谱(ＩＲ)研究了这些钝化层与ＭＣＴ之间的界面特性．结果表明:与阳极氟化膜和ＣｄＴｅ膜相比,ＺｎＳ和ＤＬＣ膜能较好地抑制ＭＣＴ组元的外扩散．ＺｎＳ层中的Ｚｎ和Ｓ易于向ＭＣＴ内部扩散,而且发现在ＺｎＳ层中有Ｏ的存在,这可能是由于ＺｎＳ易与空气中水份发生作用所致．而ＤＬＣ中Ｃ向ＭＣＴ内表面扩散较少．ＭＣＴ表面沉积ＤＬＣ薄膜后红外透过率较ＺｎＳ有明显的提高．Native fluoride, CdTe, ZnS and diamond-like carbon (DLC) passivation layers on Hg1-xCdxTe (MCT) were fabricated by chemical and physical technologies. The interface properties between the passivation layers deposited, and well-polished MCT were investigated, respectively, by AES, IR, etc. Compared with the native fluoride and CdTe films, ZnS and DLC films can all prevent the outward diffusion of the components in MCT. However, Zn and S in ZnS layer tend to diffuse into the MCT, and O is detected specially after pulse laser deposition, but C in DLC layer only slightly diffuses into the MCT. In particular, the IR transmission of MCT deposited by DLC is obviously raised and higher than that of MCT deposited by ZnS.

关 键 词：HgCdTe 表面钝化 界面. 

分 类 号：TN2[电子电信—物理电子学]