升温离子注入对医用材料Ti6A14V表面改性影响  

Influence of Elevated Temperature Ion Implantation on Surface Properties of Medical Material Ti6A14V Alloy

作　　者：赵青[1] 赵峰[2] 耿漫[3] 

机构地区：[1]电子科技大学,成都610054 [2]四川大学医学中心 [3]西南物理研究院,成都610041

出　　处：《材料热处理学报》2001年第3期83-85,共3页Transactions of Materials and Heat Treatment

基　　金：国防科技重点实验室基金 ( 98JS5 0 .3.3HZ5 80 1 )资助

摘　　要：对Ti6A1 4V合金进行温度范围从 1 0 0℃到 6 0 0℃ ,注入剂量为 4× 1 0 1 7ions.cm- 2 氮离子等离子体源离子注入 (N-PSII)。用俄歇能谱仪 (AES)对注入样品进行元素深度分布剖面分析。用显微硬度计及针盘磨损试验机测试表面改性的效果。利用X射线衍射 (XRD)分析表面改性层结构的变化。利用光学显微镜观察磨痕宽度。分析发现 ,当温度从 1 0 0℃升到 6 0 0℃时 ,注入层厚度明显增加。其中 ,高温注入时获得较高的表面硬度和较好抗磨损性。XRD分析发现 ,随温度升高注入层表面形成TiN和Ti2 N析出相。Specimens of Ti6A14V alloy were implanted with nitrogen plasma source ion implantation (N PSII) at temperature between 100℃ and 600℃ at a dose of 4×10 17 ions.cm -2 . Auger Electron Spectroscopy (AES) was used to determine the nitrogen concentration profiles. Though the Microhardness measurement and pin on disk wear test were performed to evaluate the improvement of the surface layer. X ray Diffraction (XRD) was employed to determine the phases presented in the modified layer. The thickness of the implanted layer increased by about an order of magnitude when the temperature was increased from 100℃ and 600℃. Higher surface hardness and wear resistance were also obtained at higher temperature. With the increase of the temperature, new phases (TiN, Ti 2N) were formed in the surface modified layer surface.

关 键 词：温度 磨损 TI6A14V合金 

分 类 号：TG166.5[金属学及工艺—热处理] TG174.444[金属学及工艺—金属学]