硅微陀螺机械热噪声研究  

Research on mechanical-thermal noise in micromachined gyroscopes

作　　者：刘梅[1] 周百令[1] 

机构地区：[1]东南大学仪器科学与工程系,南京210096

出　　处：《仪器仪表学报》2006年第z2期1163-1164,共2页Chinese Journal of Scientific Instrument

摘　　要：振动式硅微陀螺仪要在各种噪声干扰下,检测出极其微弱的有用信号。随着硅微陀螺性能的不断提高。机械热噪声对微陀螺的影响愈加显著,决定了振动式硅微陀螺的极限分辨率。本文给出了机械热噪声的产生机理,推导得出机械热噪声等效角速率表达式。分析表明,提高微陀螺的品质因数、增大质量和谐振频率可减小机械热噪声。Vibratory silicon micromachined gyroscopes need to check extremely small signal from all kinds of noises. With the improvement of performance in micromachined gyroscopes, the effects of mechanical-thermal noise on gyros are important, and mechanical-thermal noise defines the limit of resolution in micromachined gyros. In this paper, we present the mechanism of mechanical-thermal noise, and derive the expressions of equivalent rotation rate due to mechanical-thermal noise. The analysis reveals that the improvement of quality factor, increment of mass and resonance frequency can decrease mechanical-thermal noise.

关 键 词：振动式硅微陀螺 机械热噪声 

分 类 号：TH7-55[机械工程—仪器科学与技术]