多级弯曲磁微梁执行器力-磁耦合宏模型  

A Mechanics-Magnetic Coupling Macromodel for a Magnetic Microactuator with a Multilevel Meander

作　　者：方玉明[1] 黄庆安[1] 李伟华[1] 

机构地区：[1]东南大学MEMS教育部重点实验室

出　　处：《电子学报》2003年第z1期2194-2196,共3页Acta Electronica Sinica

基　　金：国家"8 63"计划项目 (No .2 0 0 2AA431 0 1 0 );江苏省高校自然科学研究计划资助项目 (No .0 3KJB51 0 0 89)

摘　　要：本文以多级弯曲磁微梁执行器为研究对象 ,先采用梁的模态函数线性组合来逼近梁的变形曲线 ,再将求模态磁场力的积分项分段求积 ,最后利用磁路定律 ,建立了考虑力 磁耦合的非线性方程组 ,克服了以往的模型不能考虑力 磁耦合的缺点 .方程组的复杂程度 (阶数 )与所取的模态阶数相关 .计算结果同实验数据对比表明 ,模型有足够的精度 。A mechanics-magnetic coupling macromodel for a magnetic microactuator with a Multilevel Meander is presented,in which the deformation curve of a microbeam is approximated by linear combination of the cantilever-beam's modal function.The integration for magnetic force is calculated by dividing the microbeam into several intervals,and the nonlinear equation set has been developed based on the magnetic circuit principle.The complexity of the macromodel depends on the selection of modal number.In comparison with previous conventional models,this macromodel accounts for the coupling between the beam deflection and magnetic force.The macromodel in this paper is validated by comparing its results with experimental results available in some literatures.

关 键 词：多级曲折磁芯微梁执行器 力-磁耦合 宏模型 微机械 

分 类 号：TN402[电子电信—微电子学与固体电子学] TN405