双频激光合成波长干涉仪的精确定位方法研究  

Precision Positioning Method for a Dual-frequency Synthetic-wavelength Laser Interferometer

作　　者：陈本永[1] 周砚江[1] 孙政荣[1] 吴晓维[1] 李达成[2] 

机构地区：[1]浙江工程学院测控技术及仪器系,杭州310033 [2]清华大学精密仪器与机械学系,北京100084

出　　处：《仪器仪表学报》2003年第z1期53-55,共3页Chinese Journal of Scientific Instrument

基　　金：国家自然科学基金资助项目 ( 5 0 2 75 13 8)研究内容

摘　　要：本文构筑了一种在同一干涉仪中可同时实现大范围和高精度纳米测量的双频激光合成波长干涉仪 ;针对该干涉仪的光路结构特点 ,提出一种新的粗精定位相结合的干涉信号同相位检测方法 ,实现了对不同频率干涉信号的同相位检测 ;实验测量结果表明该定位方法能够实现 0 .4A dual frequency synthetic wavelength laser interferometer that can achieve the measurement of long range with nanometer accuracy is constructed. According to the optical feature of the interferometer, a novel coarse and fine positioning method for detecting the phase difference between two interference signals with different frequencies is proposed. The experimental result shows that the positioning method has a resolution of 0.41 nm.

关 键 词：纳米测量 双频激光 合成波长 相位检测 

分 类 号：TH74[机械工程—光学工程]