新型室温工作微机械红外探测器  

Novel Room Temperature MEMS Infrared Detector

作　　者：李兰[1] 刘铮[1] 邹德恕[1] 沈光地[1] 

机构地区：[1]北京工业大学电子信息与控制工程学院北京光电子技术实验室,北京100022

出　　处：《仪器仪表学报》2003年第z2期140-141,共2页Chinese Journal of Scientific Instrument

基　　金：国家自然科学基金(69976004);北京市自然科学基金(4982005)

摘　　要：提出一种基于特殊红外吸收机理和先进微机械加工技术实现的新型室温工作红外探测器。利用在特定波段对红外辐射有强烈吸收的气体作为吸收红外辐射的媒质,采用微机械加工方法制作带有弹性敏感薄膜的微气室和微电容检测结构将吸收的红外辐射能量转换为弹性薄膜的机械形变引起电容变化并通过电学方法检测,从而实现灵敏而快速的室温红外探测器件,尤其在8～14μm有良好的应用前景。In this paper, a novel room temperature infrared detector based on a special infrared absorption mech- anism is presented, which is realized with advanced micromaching technology. Using the gas with strong infrared absorption character at certain wavelength as medium, fabricating gas cell with elastic sensitive film and micro capacitance structure by micromaching technology, the infrared energy absorbed by the gas can be transformed to mechanical deformation and be detected by electrical means. Consequently, sensitive and fast room temperature infrared detector can be achieved, which will have good application foreground especially at waveband at 8- 14μm.

关 键 词：红外探测器 微机械 弹性敏感薄膜 红外吸收气体 

分 类 号：TN21[电子电信—物理电子学]