高温压力传感器技术研究  

RESEARCH OF THE HIGHTEMPERATURE PRESSURESENSOR TECHNOLOGY

作　　者：赵玉龙[1] 赵立波[1] 蒋庄德[1] 

机构地区：[1]西安交通大学精密工程研究所,西安710049

出　　处：《机械工程学报》2002年第z1期70-72,共3页Journal of Mechanical Engineering

基　　金：国家"863"计划资助项目(2002AA404470)

摘　　要：提出的基于MEMS技术的耐高温压力传感器,采用耐高温SOI力敏元件以及梁膜组合设计,保证传感器有较高频响的同时,具有耐平衡高温和瞬时超高温的能力。研制的耐高温压力传感器可以用于0～220℃恶劣环境条件下的压力测量,并能解决1000℃的瞬时冲击。给出了传感器的结构模型和实测数据,得到比较满意结果。The high temperature pressure sensor based on the micro electromechanical system (MEMS) technology, which takes use of the high temperature SOI sensitive element and girder-film combined design, is designed. It possesses the higher frequency response and is able to endure high and instantaneous ultrahigh temperature. The sensor is used in checking and measuring the pressure beyond 0-220℃ harsh environment, and is able to endure 1 000℃ instantaneous impact. The structure model and testing data are supplied, and the result is satisfied.

关 键 词：高温压力传感器 梁膜组合设计 瞬时冲击 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]