微机械器件形状与尺寸的图像测量研究  

IMAGE MEASRUEMENT OF MI-CROMACHINED DEVICE'S DIMENSION AND SHAPE

作　　者：邓进军[1] 苑伟政[1] 李晓莹[1] 马炳和[1] 

机构地区：[1]西北工业大学微/纳米系统实验室,西安710072

出　　处：《机械工程学报》2002年第z1期101-103,107,共4页Journal of Mechanical Engineering

基　　金：容闳基金

摘　　要：采用面阵CCD作为图像传感器,结合微机械器件结构尺寸的测量特点,建立非接触式无损图像测量系统,并给出了典型平面几何尺寸的测量原理和算法。试验结果表明系统具有良好的稳定性和较高的精度。A non-contacting and harmless image measurement system is presented. According to the measurement characteristic of micromachined device's dimension, the system is setup by plane CCD as image sensor. The measurement principle and algorithm of typical plane geometric dimension is also discussed. The results of experiment show that the system is steady and precision.

关 键 词：微机械器件 形状尺寸 图像测量 

分 类 号：TP391.4[自动化与计算机技术—计算机应用技术]