扩散硅差压测量系统的理论计算与误差分析  

Theoretical Calculation and Error Analysis of Piezoresistive Differential Pressure Measurement System

作　　者：于振毅[1] 刘波[1] 

机构地区：[1]沈阳仪器仪表工艺研究所,沈阳110043

出　　处：《仪器仪表学报》2001年第z1期67-69,共3页Chinese Journal of Scientific Instrument

摘　　要：本文着重分析计算了扩散硅差压测量系统的测量原理、理论计算、设计与误差分析。文中提出的一组设计公式和基本误差分析方法是行之有效的 ,在作者完成的课题中得到应用并经实践所证实。本文讨论的问题完全适用于扩散硅差压密度计、差压压力计及其传感器和变送器的理论计算、设计与误差分析。A measurement principle, theoretical calculation and error analysis of piezoresistive differential pressure measurement system have been analyzed calculated as emphases. A group of design equations and methods of basic error analysis described in the paper are very efficient. The result has been applied in the author's research having completed and approved in practice.

关 键 词：弹性元件 基本误差 扩散硅力敏器件 非线性 

分 类 号：TH7[机械工程—仪器科学与技术]