高精度的光电式衍射光栅刻划机  

High Precision Photoelectric Diffraction Grating Ruling Engine

作　　者：时轮[1] 郝德阜[2] 齐向东[2] 

机构地区：[1]吉林工学院机电学院,长春130012 [2]中国科学院长春光学精密机械与物理研究所,长春130021

出　　处：《仪器仪表学报》2001年第z1期103-104,共2页Chinese Journal of Scientific Instrument

摘　　要：光栅刻划机被誉为“精密机械之王”,采用高精度的衍射光栅刻划机刻划依然是制作高质量母光栅最重要的手段 ,因此 ,对高精度的光电式光栅刻划机进行研究具有重要的现实意义。文中主要阐述了两类光电式刻划机的控制原理 。A diffraction grating ruling engine is known of 'the king of fine mechanics'. It is still the most important means for the fabrication of master grating. Hence, it is valuable to study the high precision photoelectric ruling engine. The principles of two sorts of photoelectric ruling engines are described and the comparisons of the characteristics of them are given in this paper.

关 键 词：光栅刻划机 控制原理 对比 

分 类 号：TH74[机械工程—光学工程]