力平衡式微加速度计系统特性研究  

Characteristics research on force balanced micro-accelerometer system

作　　者：张扬[1] 曲延滨[1] 

机构地区：[1]哈尔滨工业大学(威海)信息科学与工程学院,山东威海264209

出　　处：《福州大学学报（自然科学版）》2008年第S1期53-56,共4页Journal of Fuzhou University(Natural Science Edition)

基　　金：国家863计划资助项目(2004AA4044210)

摘　　要：力平衡式微机速度计是目前硅微速度计领域研究的热点,文章介绍了力平衡式加速度计的闭环检测原理,通过对反馈方式、偏置电压极性等对加速度计性能影响的定性分析,阐述了不同情况下提高加速度计性能所应采取的措施.Force balanced micro-accelerometer is the hotspot in the field of silicon micro-acceleration transducers.In this paper,the principle of the closed-loop detection systems for force-balance micro-accelerometer is presented.The factors such as feedback mode and bias voltage polarity which affect the performance of micro-accelerometer are qualitative analysis.How to improve the performance of micro-accelerometer is also described.

关 键 词：力平衡 微加速度计 偏置电压极性 

分 类 号：TH824.4[机械工程—仪器科学与技术]