石英玻璃管外表面抗腐蚀纳米金刚石薄膜的制备  

Deposition of anti-corrosion nanocrystalline diamond film on quartz tube

作　　者：张磊[1] 马志斌[1] 吴利峰[1] 

机构地区：[1]湖北省等离子体化学与新材料重点实验室,武汉工程大学,湖北武汉430073

出　　处：《金刚石与磨料磨具工程》2009年第1期23-26,共4页Diamond & Abrasives Engineering

基　　金：国家自然科学基金项目(10875093);湖北省高等学校优秀中青年科技创新团队计划项目(2004419)

摘　　要：在具有新型谐振腔的微波等离子体CVD装置上,利用乙醇和氢气为工作气体在石英玻璃管外表面沉积了均匀、致密的纳米金刚石薄膜。采用扫描电子显微镜、Raman光谱及X射线衍射表征了金刚石薄膜的质量;设计腐蚀实验检验了金刚石薄膜的抗腐蚀效果。结果表明:在反应气压为5.5 kPa、碳源浓度为8vol%、石英玻璃管温度为500℃的条件下,得到的纳米金刚石薄膜能有效增强石英玻璃管的抗腐蚀性能。Uniform and compact nanocrystalline diamond thin films were deposited on quartz tube substrate with the gas mixture of ethanol and hydrogen by microwave plasma CVD equipment which has a novel type of resonance cavity.The quality of diamond thin films were tested by SEM,Raman spectroscopy and XRD.A corrosion experiment was designed to test the anti-corrosion effect of diamond thin films.The results showed that when the reaction pressure is 5.5 kPa,the ethanol concentration is 8 vo1%,the reaction temperature ...

关 键 词：石英玻璃管 微波等离子体CVD 金刚石膜 抗腐蚀 

分 类 号：TB381[一般工业技术—材料科学与工程]