飞秒激光直写金属反射光栅的实验研究  

Experimental study of direct writing of metal reflective gratings with femtosecond laser

作　　者：张健[1] 王明伟[1] 赵友博[1] 刘伟伟[1] 朱晓农[1] 

机构地区：[1]南开大学现代光学研究所,光电信息技术科学教育部重点实验室,天津300071

出　　处：《光电子．激光》2009年第3期313-315,共3页Journal of Optoelectronics·Laser

基　　金：国家自然科学基金资助项目(60637020;60777007)

摘　　要：提出了利用800nm的飞秒激光在Ni金属表面直写反射型衍射光栅的新方法。研究了激光刻写速度、激光功率以及光栅周期等实验参数与直写出的反射光栅衍射效率的关系。在现有实验条件下,由50fs激光脉冲单光束直写获得的Ni质金属反射光栅的一级衍射效率η为7.47%。We propose a method to produce reflective gratings on a metal surface by using a focused near-IR 800 nm femtosecond laser beam.Through the experiments,the relationships between the diffraction efficiency of the gratings and the experimental parameters such as the laser scribing speed,the laser power and the grating period are studied.The first-order diffraction efficiency of the reflective grating that we have made on a nickel surface reaches as high as 7.47%.

关 键 词：飞秒激光 直写 反射光栅 衍射效率 

分 类 号：TN249[电子电信—物理电子学]