采用激光制备毛细管电泳芯片微结构的研究  

Study on Microstructures of Capillary Electrophoresis Chips Prepared by Excimer Laser

作　　者：刘莹[1] 姚李英[1] 刘世炳[1] 吴坚[1] 陈涛[1] 

机构地区：[1]北京工业大学激光工程研究院,北京100022

出　　处：《微细加工技术》2007年第3期23-26,共4页Microfabrication Technology

基　　金：北京市属市高等学校人才强教计划资助项目

摘　　要：提出了一种采用248 nm准分子激光直写微加工系统制备聚甲基丙烯酸甲酯(PMMA)基毛细管电泳芯片的新方法。主要对毛细管电泳芯片的样品池和微通道进行了实验研究。在19 kV,20 Hz,500个脉冲条件下,厚度为1.5 mm PMMA表面获得直径为1 mm、锥度为4.7°的池;对宽度均为100μm,深度不同的微通道底面进行了键合前后比较。最后在键合后宽度为100μm、深度为30μm的芯片上成功地完成了进样实验。A new method was proposed, which the capillary electrophoresis chips were prepared on a polymaths methacrylate (PMMA) substrate by a system of 248 nm KrF laser direct etching. In this work, the sample pools and micro-tubes were experimentally studied. During experiment, a sample pool with the diameter of 1 mm and the cone angle of 4.7° was obtained on the PMMA substrate of 1.5 mm thickness under the condition of the voltage of 19 kV, the frequency of 20 Hz and the pulse number of 500, and then the 100 μm wide microchannels with different depth were compared before and after bonding. Finally, a bonded chip with a width of 100 μm, a depth of 30 μm was obtained.

关 键 词：毛细管电泳芯片 微加工 准分子激光 聚合物 

分 类 号：TN24[电子电信—物理电子学] TN3