聚酰亚胺薄膜表面微纳米尺度下电荷特性的研究  

Study on Properties of Surface Charges on Polyimide Film in Micro-Nanometer Scale

作　　者：赵慧斌[1] 任权[1] 韩立[1] 

机构地区：[1]中国科学院电工研究所

出　　处：《微细加工技术》2007年第3期30-33,共4页Microfabrication Technology

摘　　要：利用静电力显微镜(electrostatic force microscope,EFM)在微纳米尺度下对聚酰亚胺薄膜表面的电荷起因及特性进行研究。采用Dimension 3100型扫描探针显微镜的导电探针摩擦聚酰亚胺薄膜表面,在薄膜微纳米区域内产生电荷分布。通过静电力显微镜对微纳米区域产生的电荷进行表征,得出探针摩擦速度、探针电压对表面电荷的极性、密度、区域分布有很大的影响。同时也为微纳米尺度下探索聚合物绝缘材料表面电荷生成规律和机理提供了一个新的研究方法和途径。Electrostatic Force Microscope (EFM) was applied to study the origin and properties of surface charges on polyimide (PI) films in micro-nanometer scale. The surface charges were generated by frictionating the surfaces of the PI films using the conductive probe of Dimension 3100 scanning probe microscope (SPM). After the surface charges were characterized by EFM, the results indicate that the frictional speed of the probe and the voltage applied to it greatly influence on the polarity, density and distribution of the surface charge. Then, the origin and properties of surface charge were physically explained. The research provides a new way for study on the rule and mechanism of generating surface charges on the insulated films formed by polymer.

关 键 词：聚酰亚胺 表面电荷 扫描探针显微镜 静电力显微镜 

分 类 号：TN04[电子电信—物理电子学] TN05