评价任意面型微光学元件制作误差的方法  

Evaluating Method of Fabrication Error of Micro-optical Elements with Arbitrary Profiles

作　　者：高洪涛[1] 杜春雷[1] 张雨东[2] 

机构地区：[1]中国科学院光电技术研究所微细加工光学技术国家重点实验室 [2]中国科学院光电技术研究所,成都610209

出　　处：《微细加工技术》2007年第4期27-29,共3页Microfabrication Technology

摘　　要：提出一种可用于评价任意面型微光学元件制作误差的方法。利用泽尼克多项式描述微光学元件面型,针对元件检测过程中的旋转对准偏差,给出泽尼克系数随旋转角度的变化关系;以设计面型和实测面型之间的均方根偏差(RMS)为加工误差的评价指标,根据其相对于旋转角度的依赖曲线,最小的RMS即是加工误差。数值模拟结果表明,该方法可以将旋转对准偏差矫正,从而有效地评价了制作误差。该方法可应用于任意面型微光学元件的研制。An evaluating method of fabrication error of a micro-optical element with arbitrary profile was introduced.The profile of the element was described using the Zernike polynomials.For the deviation of rotation alignment occurring in the test of the element,the dependent relation of the Zernike coefficients on the rotation angle was given.The root mean square(RMS) of the deviation between the designed and measured profile is used as the metric of the fabrication error,then the minimum RMS value is the fabrication error according to the dependent curve of the metric on the rotation angle.A numerical simulation indicates that this method can be used to correct the deviation of the rotation alignment of the element so that the fabrication error can be evaluated effectively.This method can be used in the study for the micro-optical elements with arbitrary profiles.

关 键 词：微光学元件 制作误差 泽尼克多项式 任意表面 

分 类 号：O439[机械工程—光学工程]