Preparation of patterned SiC and SiCN microstructures  

作　　者：SUNG In-kyung KIM Dong-pyo 

机构地区：[1]Department of Fine Chemical Engineering and Chemistry of Chungnam National University, Taejon,South Korea, 305-764

出　　处：《Science China(Technological Sciences)》2006年第2期164-171,共8页中国科学（技术科学英文版）

基　　金：This work was supported by the National Natural Science Foundation of China (Grant No. 59972042); Korea National Research Laboratory Program (Grant No. M10400000061-04J0000-06110);the Doctor Innovation Fund of the National University of Defense Technogy in China(2001-2004).

摘　　要：Patterned SiC and SiCN microstructures were successfully fabricated on the silicon substrates by using polydimethylsiloxane (PDMS) elastometric stamp as template, polycarbosilane (PCS) and polysilazane (PSZ) as preceramic polymers. The preparing process was followed by precursor infiltration, the curing of the precursor, demolding of the template and pyrolysis of the cured preceramic polymer pattern. It shows that the dimen- sions of the ceramic patterns can be tailored by using the PDMS molds with different di- mensions. The produced ceramic microstructures can be potentially applied in high tem- perature and high pressure environments due to the advanced properties of the SiC and SiCN ceramics.Patterned SiC and SiCN microstructures were successfully fabricated on the silicon substrates by using polydimethylsiloxane (PDMS) elastometric stamp as template, polycarbosilane (PCS) and polysilazane (PSZ) as preceramic polymers. The preparing process was followed by precursor infiltration, the curing of the precursor, demolding of the template and pyrolysis of the cured preceramic polymer pattern. It shows that the dimensions of the ceramic patterns can be tailored by using the PDMS molds with different dimensions. The produced ceramic microstructures can be potentially applied in high temperature and high pressure environments due to the advanced properties of the SiC and SiCN ceramics.

关 键 词：MICRO-FABRICATION technique  soft lithography  ELASTOMERIC stamp  non-oxide ceramics  patterning. 

分 类 号：TB332[一般工业技术—材料科学与工程]