supported by the Natural Sciences and Engineering Research Council of Canada(NSERC),Ontario Centres for Excellence(OCE),Canada,and Canada Foundation of Innovation(CFI),the University of Waterloo.
InGaN/GaN micro-light-emitting diodes(micro-LEDs)with a metal–insulator-semiconductor(MIS)structure on the sidewall are proposed to improve efficiency.In this MIS structure,a sidewall electrode is deposited on the in...
funded by the National Defense Science and Technology Innovation Special Zone–Spark Project(20-163-00-TS-009-152-01);the National Natural Science Foundation of China(U20A20227,61974030);the National Key R&D Program of China(2019YFA0709504);the National Natural Science Foundation of China(31900719).
Invasive neural probes are one of the most critical components in the intracortical neural signal recording system.However,they can cause brain damage and tissue response during and after implantation.Thus,neural prob...
Ceramic materials are increasingly used in micro-electro-mechanical systems(MEMS)as they offer many advantages such as high-temperature resistance,high wear resistance,low density,and favourable mechanical and chemica...
supported by the National Key Research and Development Program of China(No.2017YFB0503200);the National Natural Science Foundation of China(Nos.61675185 and 61875250);the Natural Science Foundation of Shanxi Province(No.201701D121065)
A vapor cell provides a well-controlled and stable inner atmosphere for atomic sensors,such as atomic gyroscopes,atomic magnetometers,and atomic clocks,and its hermeticity affects the stability and aging of atomic sen...
supported by the National Key Research and Development Program of China(No.2017YFB0503200);the National Natural Science Foundation of China(Nos.61675185 and 61875250);the Natural Science Foundation of Shanxi Province(No.201701D121065);Fund Program for the Scientific Activities of Selected Returned Overseas Professionals in Shanxi Province;the Program for the Top Young and Middle-Aged Innovative Talents of HigherLearning Institutions of Shanxi;sponsored by the Fund for Shanxi ‘1331 Project’ Key Subject Construction
As the key part of chip-scale atomic clocks(CSACs), the vapor cell directly determines the volume, stability,and power consumption of the CSAC. The reduction of the power consumption and CSAC volumes demands the manuf...
Direct-write additive manufacturing refers to a rich and growing repertoire of well-established fabrication techniques that builds solid objects directly from compu- ter-generated solid models without elaborate interm...
Project supported by the National Natural Science Foundation of China(Grant Nos.91321208,11374344,11404386,11574380,and 11674376);the Ministry of Science and Technology of China(Grant Nos.2014CB921401 and 2016YFA0300601);the Strategic Priority Research Program of the Chinese Academy of Sciences(Grant No.XDB07010300)
We have fabricated two types of lumped-element Josephson parameter amplifiers(JPAs) by using a multilayer microfabrication process involving wet etching of Al films. The first type is a narrow band JPA which shows t...
This review gives a concise introduction to the state-of-art techniques used for surface texturing, e.g., wet etching, plasma etching, laser surface texturing (LST), 3D printing, etc. In order to fabricate determinist...
For the purpose of improving the precision of the inertial guidance system,it is necessary to enhance the accuracy of the accelerometer.Combining the micro-fabrication processes with resonant sensor technology,a high-...