MICRO-FABRICATION

作品数:15被引量:23H指数:3
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相关期刊:《Chinese Physics B》《Chip》《辐射研究与辐射工艺学报》《Bulletin of the Chinese Academy of Sciences》更多>>
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Efficiency improvement by using metal–insulator‑semiconductor structure in InGaN/GaN micro‑light‑emitting diodes被引量:1
《Frontiers of Optoelectronics》2024年第1期77-84,共8页Jian Yin David Hwang Hossein Zamani Siboni Ehsanollah Fathi Reza Chaji Dayan Ban 
supported by the Natural Sciences and Engineering Research Council of Canada(NSERC),Ontario Centres for Excellence(OCE),Canada,and Canada Foundation of Innovation(CFI),the University of Waterloo.
InGaN/GaN micro-light-emitting diodes(micro-LEDs)with a metal–insulator-semiconductor(MIS)structure on the sidewall are proposed to improve efficiency.In this MIS structure,a sidewall electrode is deposited on the in...
关键词:Micro-LED GaN EQE improvement MICRO-FABRICATION 
A tassel-type multilayer flexible probe for invasive neural recording
《Chip》2022年第3期69-76,共8页Zi-Peng Ye Jing Qi Yi-Ling Ni Zhi-Yong Wu Xiao Xiao Shi-Sheng Xiong 
funded by the National Defense Science and Technology Innovation Special Zone–Spark Project(20-163-00-TS-009-152-01);the National Natural Science Foundation of China(U20A20227,61974030);the National Key R&D Program of China(2019YFA0709504);the National Natural Science Foundation of China(31900719).
Invasive neural probes are one of the most critical components in the intracortical neural signal recording system.However,they can cause brain damage and tissue response during and after implantation.Thus,neural prob...
关键词:Neural probe Tassel-type Micro-fabrication process Mask-less lithography POLYIMIDE 
Micro-fabrication of ceramics:Additive manufacturing and conventional technologies被引量:7
《Journal of Advanced Ceramics》2021年第1期1-27,共27页Hany HASSANIN Khamis ESSA Amr ELSHAER Mohamed IMBABY Heba H.EL-MONGY Tamer A.EL-SAYED 
Ceramic materials are increasingly used in micro-electro-mechanical systems(MEMS)as they offer many advantages such as high-temperature resistance,high wear resistance,low density,and favourable mechanical and chemica...
关键词:micro-electro-mechanical system(MEMS) MICRO-FABRICATION CERAMICS micro parts additive manufacturing 
Micro-fabrication and hermeticity measurement of alkali-atom vapor cells based on anodic bonding
《Chinese Optics Letters》2019年第10期88-92,共5页Lu Zhang Wendong Zhang Shougang Zhang Shubin Yan 
supported by the National Key Research and Development Program of China(No.2017YFB0503200);the National Natural Science Foundation of China(Nos.61675185 and 61875250);the Natural Science Foundation of Shanxi Province(No.201701D121065)
A vapor cell provides a well-controlled and stable inner atmosphere for atomic sensors,such as atomic gyroscopes,atomic magnetometers,and atomic clocks,and its hermeticity affects the stability and aging of atomic sen...
关键词:BONDING anodic ALKALI 
Micro-fabrication process of vapor cells for chip-scale atomic clocks被引量:2
《Chinese Optics Letters》2019年第4期10-14,共5页Yanjun Zhang Yunchao Li Xuwen Hu Lu Zhang Zhaojun Liu Kaifang Zhang Shihao Mou Shougang zkang Shubin Yan 
supported by the National Key Research and Development Program of China(No.2017YFB0503200);the National Natural Science Foundation of China(Nos.61675185 and 61875250);the Natural Science Foundation of Shanxi Province(No.201701D121065);Fund Program for the Scientific Activities of Selected Returned Overseas Professionals in Shanxi Province;the Program for the Top Young and Middle-Aged Innovative Talents of HigherLearning Institutions of Shanxi;sponsored by the Fund for Shanxi ‘1331 Project’ Key Subject Construction
As the key part of chip-scale atomic clocks(CSACs), the vapor cell directly determines the volume, stability,and power consumption of the CSAC. The reduction of the power consumption and CSAC volumes demands the manuf...
关键词:chip-scale atomic clocks directly DETERMINES OPTICAL-ABSORPTION resonance 
Additive direct-write microfabrication for MEMS: A review被引量:1
《Frontiers of Mechanical Engineering》2017年第4期490-509,共20页Kwok Siong TEH 
Direct-write additive manufacturing refers to a rich and growing repertoire of well-established fabrication techniques that builds solid objects directly from compu- ter-generated solid models without elaborate interm...
关键词:direct-write additive manufacturing MICRO-FABRICATION MEMS 
Fabrication and characterization of ultra-low noise narrow and wide band Josephson parametric amplifiers
《Chinese Physics B》2017年第9期198-203,共6页黄克强 郭秋江 宋超 郑亚锐 邓辉 吴玉林 金贻荣 朱晓波 郑东宁 
Project supported by the National Natural Science Foundation of China(Grant Nos.91321208,11374344,11404386,11574380,and 11674376);the Ministry of Science and Technology of China(Grant Nos.2014CB921401 and 2016YFA0300601);the Strategic Priority Research Program of the Chinese Academy of Sciences(Grant No.XDB07010300)
We have fabricated two types of lumped-element Josephson parameter amplifiers(JPAs) by using a multilayer microfabrication process involving wet etching of Al films. The first type is a narrow band JPA which shows t...
关键词:Josephson parameter amplifier multilayer micro-fabrication qubit state readout 
Selection of micro-fabrication techniques on stainless steel sheet for skin friction被引量:4
《Friction》2016年第2期89-104,共16页S.ZHANG X.ZENG D.T.A.MATTHEWS A.IGARTUA E.RODRIGUEZ-VIDAL J.CONTRERAS FORTES V.SAENZ DE VITERI 
This review gives a concise introduction to the state-of-art techniques used for surface texturing, e.g., wet etching, plasma etching, laser surface texturing (LST), 3D printing, etc. In order to fabricate determinist...
关键词:MICROFABRICATION surface texturing 
Micro-Fabrication on Surface of Transparent Solid Materials by Nanosecond Laser
《材料科学与工程(中英文B版)》2012年第8期471-481,共11页Takeji Arai 
关键词:表面微加工 固体材料 纳秒激光 聚焦激光束 玻璃表面 研究人员 光吸收率 输出能量 
Novel Resonant Accelerometer with Micro Leverage Fabricated by MEMS Technology被引量:6
《Chinese Journal of Mechanical Engineering》2011年第3期495-500,共6页HE Gaofa TANG Yike ZHOU Chuande HE Xiaoping WU Ying 
For the purpose of improving the precision of the inertial guidance system,it is necessary to enhance the accuracy of the accelerometer.Combining the micro-fabrication processes with resonant sensor technology,a high-...
关键词:ACCELEROMETER RESONATOR MICRO-FABRICATION SENSOR 
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