MICROFABRICATION

作品数:70被引量:173H指数:8
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相关领域:电子电信更多>>
相关作者:伊福廷彭良强张菊芳韩勇隋晓红更多>>
相关机构:中国科学院浙江大学上海交通大学更多>>
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相关基金:国家自然科学基金国家重点基础研究发展计划中国博士后科学基金国家高技术研究发展计划更多>>
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Photolithographic Microfabrication of Microbatteries for On-Chip Energy Storage
《Nano-Micro Letters》2025年第5期117-144,共28页Yuan Ma Sen Wang Zhong-Shuai Wu 
supported by the National Natural Science Foundation of China(22125903,22439003,22209175);the National Key R&D Program of China(Grant 2022YFA1504100,2023YFB4005204);the Energy Revolution S&T Program of Yulin Innovation Institute of Clean Energy(Grant E412010508);the State Key Laboratory of Catalysis(No:2024SKL-A-001)。
Microbatteries(MBs)are crucial to power miniaturized devices for the Internet of Things.In the evolutionary journey of MBs,fabrication technology emerges as the cornerstone,guiding the intricacies of their configurati...
关键词:MICROBATTERIES PHOTOLITHOGRAPHY Internet of Things MICROPATTERNS On-chip energy storage 
Construction and manipulation of origami-inspired tubular structures with controlled mechanical buckling for collection and transportation of microspheres based on optically induced electrokinetics
《Science China(Technological Sciences)》2024年第9期2954-2964,共11页YANG WenGuang WANG WenHao TENG XiangYu QIAO ZeZheng YU HaiBo 
supported by the National Natural Science Foundation of China(Grant No.62273289);the Youth Innovation Science and Technology Support Program of Shandong Province(Grant No.2022KJ274)。
The development of microengineered hydrogels has opened up unlimited possibilities for designing complex structures at the microscale. In this study, we constructed an origami-inspired tubular structure with controlle...
关键词:origami-inspired tubular structures optically induced electrokinetics MICROFABRICATION mechanical buckling 
Etching of quartz crystals in liquid phase environment:A review
《Nanotechnology and Precision Engineering》2024年第2期87-109,共23页Yide Dong Yike Zhou Haizhou Huang Bosong Zhang Xihan Li Kaiwen Chen Litao Sun Guangbin Dou 
supported by the Natural Science Foundation of China (Grant No.12234005);the major research and development program of Jiangsu Province (Grant Nos.BE2021007-2 and BK20222007)。
Quartz crystals are the most widely used material in resonant sensors,owing to their excellent piezoelectric and mechanical properties.With the development of portable and wearable devices,higher processing efficiency...
关键词:Quartz crystal Materials processing Wet etching MICROFABRICATION Quartz MEMS 
Functional microfluidics:theory,microfabrication,and applications被引量:1
《International Journal of Extreme Manufacturing》2024年第3期140-173,共34页Mingzhu Xie Ziheng Zhan Yinfeng Li Junkai Zhao Ce Zhang Zhaolong Wang Zuankai Wang 
supported by the National Natural Science Foundation of China(52006056);the Key-Area Research and Development Program of Guangdong Province(2020B090923003);The project was also partly supported by Natural Research Institute for Family Planning as well。
Microfluidic devices are composed of microchannels with a diameter ranging from ten to a few hundred micrometers.Thus,quite a small(10-9–10-18l)amount of liquid can be manipulated by such a precise system.In the past...
关键词:capillary theory functional devices functional microfluidics 
Cell architecture designs towards high-energy-density microscale energy storage devices被引量:1
《Nano Research Energy》2024年第2期69-82,共14页Kwon-Hyung Lee Sang-Young Lee 
the Basic Science Research Program(Nos.2021R1A2B5B03001615,2021M3H4A1A02099355,and 2021M3D1A2043791)through the National Research Foundation of Korea(NRF)grant by the Korean Government(MSIT).
The rapid growth of miniaturized electronics has led to an urgent demand for microscale energy storage devices(MESDs)to sustainably power the micro electronic devices.However,most MESDs reported to date have suffered ...
关键词:microscale energy storage device cell architecture MICROFABRICATION MINIATURIZATION high-energy-density 
Leveraging electrochemical sensors to improve efficiency of cancer detection
《World Journal of Clinical Oncology》2024年第3期360-366,共7页Li Fu Hassan Karimi-Maleh 
Electrochemical biosensors have emerged as a promising technology for cancer detection due to their high sensitivity,rapid response,low cost,and capability for non-invasive detection.Recent advances in nanomaterials l...
关键词:Electrochemical sensors Cancer biomarkers NANOMATERIALS Point-of-care diagnostics MICROFABRICATION Machine learning 
Efficient synthesis of vitamin D_(3) in a 3D ultraviolet photochemical microreactor fabricated using an ultrafast laser
《Light(Advanced Manufacturing)》2024年第1期73-81,共9页Aodong Zhang Jian Xu Lingling Xia Ming Hu Yunpeng Song Miao Wu Ya Cheng 
supported by the National Natural Science Foundation of China(Grant Nos.12174107,61991444,11933005,12192251,and 12334014);National Key R&D Program of China(Grant No.2019YFA0705000);Science and Technology Commission of Shanghai Municipality(Grant No.21DZ1101500);Shanghai Municipal Science and Technology Major Project;Fundamental Research Funds for the Central Universities.
Large-scale,high-precision,and high-transparency microchannels hold great potential for developing high-performance continuous-flow photochemical reactions.We demonstrated ultrafast laser-enabled fabrication of three-...
关键词:Ultrafast laser microfabrication Fused silica microchannels UV photochemical reactors Continuousflow synthesis Vitamin D_(3) 
Micromolded honeycomb scaffold design to support the generation of a bilayered RPE and photoreceptor cell construct被引量:3
《Bioactive Materials》2023年第12期142-153,共12页In-Kyu Lee Ruosen Xie Agustin Luz-Madrigal Seunghwan Min Jingcheng Zhu Jiahe Jin Kimberly L.Edwards M.Joseph Phillips Allison L.Ludwig David M.Gamm Shaoqin Gong Zhenqiang Ma 
the Department of Defense through the Vision Research Program under award no.W81XWH-20-1-0655;Opinions,interpretations,conclusions,and recommendations are those of the authors and are not necessarily endorsed by the Department of Defense.This work was also supported by Fighting Blindness Canada including philanthropic support from Donna Green and Goldie Feldman,Research to Prevent Blindness,RRF Emmett A.Humble Distinguished Directorship,McPherson Eye Research Institute Sandra Lemke Trout Chair in Eye Research(to D.M.G);NIH grant P51OD011106 to the Wisconsin National Primate Research Center,and NIH grant U54HD090256 to the Waisman Intellectual and Developmental Disabilities Research Center.;A.L.L.was supported by the UW-Madison School of Veterinary Medicine Dual DVM/PhD Program,NIH/NEI U24 EY029890;Kirschstein NRSA Predoctoral Fellowship NIH/NEI F30 EY031230;the Waisman Center from the National Institute of Child Health and Human Development(P50HD105353).
Age-related macular degeneration(AMD)causes blindness due to loss of retinal pigment epithelium(RPE)and photoreceptors(PRs),which comprise the two outermost layers of the retina.Given the small size of the macula and ...
关键词:MICROFABRICATION RETINA Scaffolds Stem cells Tissue engineering 
Feature size below 100 nm realized by UVLEDbased microscope projection photolithography
《Light(Advanced Manufacturing)》2023年第4期72-81,共10页Lei Zheng Tobias Birr Urs Zywietz Carsten Reinhardt Bernhard Roth 
the financial support from the German Research Foundation(DFG)under Germany’s Excellence Strategy within the Cluster of Excellence PhoenixD(EXC 2122,Project ID 390833453).
The demand for miniaturization and integration of optical elements has fostered the development of various micro-and nanofabrication technologies.In this work,we developed a low-cost UV-LED-based microscope projection...
关键词:MICROFABRICATION Nanofabrication Subwavelength structuring Projection lithography UV-LED lithography 
Development of a simple two-step lithography fabrication process for resonant tunneling diode using air-bridge technology
《Journal of Semiconductors》2023年第11期79-82,共4页Swagata Samanta Jue Wang Edward Wasige 
funded by Horizon 2020 Future and Emerging Technologies ChipAI project under the grant agreement 828841.
This article reports on the development of a simple two-step lithography process for double barrier quantum well(DBQW)InGaAs/AlAs resonant tunneling diode(RTD)on a semi-insulating indium phosphide(InP)substrate using ...
关键词:AIR-BRIDGE indium phosphide MICROFABRICATION resonant tunneling diode 
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