PHOTOLITHOGRAPHY

作品数：69被引量：134H指数：6
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Photolithographic Microfabrication of Microbatteries for On-Chip Energy Storage
《Nano-Micro Letters》2025年第5期117-144,共28页Yuan Ma Sen Wang Zhong-Shuai Wu 
supported by the National Natural Science Foundation of China(22125903,22439003,22209175);the National Key R&D Program of China(Grant 2022YFA1504100,2023YFB4005204);the Energy Revolution S&T Program of Yulin Innovation Institute of Clean Energy(Grant E412010508);the State Key Laboratory of Catalysis(No:2024SKL-A-001)。
Microbatteries(MBs)are crucial to power miniaturized devices for the Internet of Things.In the evolutionary journey of MBs,fabrication technology emerges as the cornerstone,guiding the intricacies of their configurati...
关键词：MICROBATTERIES PHOTOLITHOGRAPHY Internet of Things MICROPATTERNS On-chip energy storage 
Recent advances of photolithography patterning of quantum dots for micro-display applications
《Nano Materials Science》2025年第1期49-64,共16页Xuemin Kong Xiaotong Fan Yuhui Wang Yunshu Luo Yihang Chen Tingzhu Wu Zhong Chen Yue Lin Shuli Wang 
supported by the National Natural Science Foundation of China(62374142,12175189 and 11904302);External Cooperation Program of Fujian(2022I0004);Fundamental Research Funds for the Central Universities(20720190005 and 20720220085);Major Science and Technology Project of Xiamen in China(3502Z20191015).
The preparation of red,green,and blue quantum dot(QD)pixelated arrays with high precision,resolution,and brightness poses a significant challenge on the development of advanced micro-displays for virtual,augmented,and...
关键词：Quantum dot PHOTOLITHOGRAPHY Patterning technology Micro-display 
Research progress of quantum dot photolithography patterning and direct photolithography application被引量：1
《Nano Research》2024年第12期10386-10411,共26页Zhong Chen Yu Li Zhongwei Man Aiwei Tang 
supported by the National Natural Science Foundation of China(No.12274021);the Beijing Natural Science Foundation(No.Z220007);the Talent Fund of Beijing Jiaotong University(No.KVXKRC24004532).
For the new display technology based on quantum dots(QDs),realizing high-precision arrays of red,green,and blue(RGB)pixels has been a significant research focus at present,aimed at achieving high-quality and high-reso...
关键词：display quantum dots PATTERNING PHOTOLITHOGRAPHY PHOTOCHEMISTRY 
Long wavelength infrared metalens fabricated by photolithography
《红外与毫米波学报》2024年第5期603-608,共6页LI Yun-Peng LUO Jia-Cheng JI Ruo-Nan XIE Mao-Bin CUI Wen-Nan WANG Shao-Wei LIU Feng LU Wei 
Supported by National Key R&D Program of China(2021YFA0715500);National Natural Science Foundation of China(NSFC)(12227901);Strategic Priority Research Program(B)of the Chinese Academy of Sciences(XDB0580000);Chinese Academy of Sciences President's In-ternational Fellowship Initiative(2021PT0007).
Metasurfaces in the long wave infrared(LWIR)spectrum hold great potential for applications in ther-mal imaging,atmospheric remote sensing,and target identification,among others.In this study,we designed and experiment...
关键词：long wave infrared broadband operation passive imaging 
Advancing microarray fabrication:One-pot synthesis and highresolution patterning of UV-crosslinkable perovskite quantum dots被引量：1
《Nano Research》2024年第9期8600-8609,共10页Linfeng Yuan Dejian Chen Kun He Jiamin Xu Kunyuan Xu Jie Hu Sisi Liang Haomiao Zhu 
the Research Project of Mindu Innovation Laboratory(No.2021ZZ114);the Natural Science Foundation of Xiamen(No.3502Z20227255);the Science and Technology Major Project of Fujian Province(No.2021HZ021013).
The development of highly efficient,solution-processable,and environmentally stable perovskite quantum dots(PQDs)is crucial for their accurate high-resolution patterning and subsequently enabling the practical deploym...
关键词：perovskite quantum dots microarrays cross-linking strategy Inkjet printing PHOTOLITHOGRAPHY 
Feature size below 100 nm realized by UVLEDbased microscope projection photolithography
《Light(Advanced Manufacturing)》2023年第4期72-81,共10页Lei Zheng Tobias Birr Urs Zywietz Carsten Reinhardt Bernhard Roth 
the financial support from the German Research Foundation(DFG)under Germany’s Excellence Strategy within the Cluster of Excellence PhoenixD(EXC 2122,Project ID 390833453).
The demand for miniaturization and integration of optical elements has fostered the development of various micro-and nanofabrication technologies.In this work,we developed a low-cost UV-LED-based microscope projection...
关键词：MICROFABRICATION Nanofabrication Subwavelength structuring Projection lithography UV-LED lithography 
Low-damage photolithography for magnetically doped(Bi,Sb)_(2)Te_(3) quantum anomalous Hall thin films
《Chinese Physics B》2023年第11期257-262,共6页高志廷 郭明华 连梓臣 李耀鑫 白云鹤 冯硝 何珂 王亚愚 刘畅 张金松 
supported by the National Key Research and Development Program of China (Grant No. 2018YFA0307100);the Basic Science Center Project of the National Natural Science Foundation of China (Grant No. 52388201);the National Natural Science Foundation of China (Grant Nos. 12274453 and 92065206);the Innovation Program for Quantum Science and Technology (Grant No. 2021ZD0302502);supported by Open Research Fund Program of the State Key Laboratory of Low-Dimensional Quantum Physics (Grant No. KF202204);supported by the New Cornerstone Science Foundation through the New Cornerstone Investigator Program;the XPLORER PRIZE。
We have developed a low-damage photolithography method for magnetically doped(Bi,Sb)_(2)Te_(3)quantum anomalous Hall(QAH) thin films incorporating an additional resist layer of poly(methyl methacrylate)(PMMA). By perf...
关键词：topological insulator quantum anomalous Hall effect fabrication techniques 
Volumetric helical additive manufacturing
《Light(Advanced Manufacturing)》2023年第2期48-56,共9页Antoine Boniface Florian Mattre Jorge Madrid-Wolff Christophe Moser 
the Swiss National Science Foundation under project number 196971-“Light based Volumetric printing in scattering resins”European Union’s Horizon 2020 research and innovation programme under grant agreement No 964497;the free or open-source tools(and their contributors)which were used in this work,including Tinkercad.com,FreeCADweb.org,Inkscape.org,Python.org,PyTorch.org,and Thingiverse.com.
3D printing has revolutionized the manufacturing of volumetric components and structures for various fields.Thanks to the advent of photocurable resins,several fully volumetric light-based techniques have been recentl...
关键词：Volumetric additive manufacturing PHOTOLITHOGRAPHY Light-based 3D printing TOMOGRAPHY 
DTFab:A Digital Twin based Approach for Optimal Reticle Management in Semiconductor Photolithography
《Journal of Systems Science and Systems Engineering》2023年第3期320-351,共32页Chandrasekhar Komaralingam Sivasubramanian Robert Dodge Aditya Ramani David Bayba Mani Janakiram Eric Butcher Joseph Gonzales Giulia Pedrielli 
supported by the Intel Research under Grant No.00035705;the NSF-CISE under Grant No.2000792。
Photolithography is among the key phases in chip manufacturing.It is also among the most expensive with manufacturing equipment valued at the hundreds of millions of dollars.It is paramount that the process is ran eff...
关键词：Semiconductor manufacturing reinforcement learning reticle management digital twin 
Regulation of actin cytoskeleton via photolithographic micropatterning被引量：2
《Journal of Innovative Optical Health Sciences》2023年第2期50-57,共8页Fulin Xing Haimei Zhang Mengyu Li Hao Dong Xuehe Ma Shiyu Deng Fen Hu Imshik Lee Leiting Pan Jingjun Xu 
This work was supported by the Guangdong Major Project of Basic and Applied Basic Research(2020B0301030009);the National Key Research and Development Program of China(2022YFC3400600)National Natural Science Foundation of China(12174208,32227802,11874231,31801134 and 31870843);Tianjin Natural Science Foundation(20JCYBJC01010);China Postdoctoral Science Foundation(2020M680032);Fundamental Research Funds for the Central Universities(2122021337 and 2122021405).
Actin cytoskeleton plays crucial roles in various cellular functions.Extracellular matrix(ECM)can modulate cell morphology by remodeling the internal cytoskeleton.To define how geometry of ECM regulates the organizati...
关键词：Actin cytoskeleton PHOTOLITHOGRAPHY MICROPATTERNING extracellular matrix 
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