Micro-fabrication of ceramics:Additive manufacturing and conventional technologies  

作　　者：Hany HASSANIN Khamis ESSA Amr ELSHAER Mohamed IMBABY Heba H.EL-MONGY Tamer A.EL-SAYED 

机构地区：[1]School of Engineering,Canterbury Christ Church University,Canterbury,CT11QU,UK [2]University of Birmingham,Edgbaston,B152TT,UK [3]Kingston University London,Penrhyn Road,Kingston Upon Thames,Surrey,KT12EE,UK [4]Department of Mechanical Design,Faculty of Engineering,Mataria,Helwan University,P.O.Box.11718,Cairo,Egypt [5]Jubail University College,Mechanical Engineering,Kingdom of Saudi Arabia [6]Center for Applied Dynamics Research(CADR),School of Engineering,University of Aberdeen,Aberdeen,AB243UE,UK

出　　处：《Journal of Advanced Ceramics》2021年第1期1-27,共27页先进陶瓷（英文）

摘　　要：Ceramic materials are increasingly used in micro-electro-mechanical systems(MEMS)as they offer many advantages such as high-temperature resistance,high wear resistance,low density,and favourable mechanical and chemical properties at elevated temperature.However,with the emerging of additive manufacturing,the use of ceramics for functional and structural MEMS raises new opportunities and challenges.This paper provides an extensive review of the manufacturing processes used for ceramic-based MEMS,including additive and conventional manufacturing technologies.The review covers the micro-fabrication techniques of ceramics with the focus on their operating principles,main features,and processed materials.Challenges that need to be addressed in applying additive technologies in MEMS include ceramic printing on wafers,post-processing at the micro-level,resolution,and quality control.The paper also sheds light on the new possibilities of ceramic additive micro-fabrication and their potential applications,which indicates a promising future.

关 键 词：micro-electro-mechanical system(MEMS) MICRO-FABRICATION CERAMICS micro parts additive manufacturing 

分 类 号：TQ174.1[化学工程—陶瓷工业]