PMMA基PCR微流控生物芯片准分子激光加工  

Excimer Laser Micromachining of PMMA Based on PCR Micro-fluidic Biologic Chip

作　　者：祁恒[1] 姚李英[1] 王桐[1] 陈涛[1] 左铁钏[1] 

机构地区：[1]北京工业大学激光工程研究院,北京100022

出　　处：《微细加工技术》2006年第1期16-19,共4页Microfabrication Technology

基　　金：国家自然科学基金重点项目资助(50335050);北京市自然科学基金重点项目资助(3031001)

摘　　要：采用准分子激光在PMMA基片上刻蚀加工出PCR微流控生物芯片,分析了准分子激光能量密度和工作台移动速度对微通道加工质量(深度及粗糙度)的影响,加工过程中选择较低的激光能量密度和较高的工作台移动速度,都有利于获得底面更加光滑的微通道。通过热键合的方法制备出完整的密闭式PCR微流控生物芯片。PCR micro-fluidic biologic chip was fabricated on PMMA substrate by using excimer laser. The impact of excimer laser's fluence and the stage velocity on microchannel's qualities including depth and roughness was analysed. Smoother microchannel could be etched by using lower laser fluence and stage velocity. The whole sealed PMMA based on PCR micro-fluidic biologic chip was bonded by hotpress method.

关 键 词：微加工 微流控生物芯片 准分子激光 聚合酶链式反应 

分 类 号：TN249[电子电信—物理电子学]