基于MEMS的条栅状微过滤器的设计与制作  

Design and Produce of a Stripe Mesh Microfilter Based on MEMS

作　　者：何林[1] 吴一辉[1] 张平[1] 宣明[1] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室

出　　处：《微细加工技术》2006年第1期48-51,共4页Microfabrication Technology

基　　金：国家863MEMS重大专项资助项目(2004AA404250);中科院二期创新基金资助项目(C02X01Z)

摘　　要：为了满足微型全分析系统对样品分离的集成度要求,提出了一种新型的微分离技术。利用MEMS技术设计制作了一种条栅状的硅微结构的过滤器,线宽14μm,周期40μm。介绍了其制作工艺,并用碳化硒微粒做了过滤实验以验证其过滤效率。结果表明,这种硅微过滤器能有效去除悬液中直径在14μm以上的微粒,且生物兼容性好,结构简单,易于实现片内集成。In order to meet the requirement of sample separation process in micro total analysis system (μTAs), a new microseparation method is presented. A stripe-gate microfilter has been designed and produced on the silicon by the MEMS technology, the linewidth and the period of that are 14 μm and 40 μm, respecting. The fabricating process is introduced. To determine the utility of the microfilter, the testing was done by filtering dilute suspensions of SeC micropartical with the filter. The experimental results indicate that it can remove the particles of 14 μm diameter from the suspension. The microfilter structure has advantages of simplicity and compatibility, and can be easily integrated in a biochip.

关 键 词：微型全分析系统(μTAS) 血细胞分离 微过滤器 MEMS 微分离技术 

分 类 号：TP65+2.1[自动化与计算机技术—控制理论与控制工程]